JPS5197366A - - Google Patents
Info
- Publication number
- JPS5197366A JPS5197366A JP2189775A JP2189775A JPS5197366A JP S5197366 A JPS5197366 A JP S5197366A JP 2189775 A JP2189775 A JP 2189775A JP 2189775 A JP2189775 A JP 2189775A JP S5197366 A JPS5197366 A JP S5197366A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2189775A JPS5197366A (ja) | 1975-02-24 | 1975-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2189775A JPS5197366A (ja) | 1975-02-24 | 1975-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5197366A true JPS5197366A (ja) | 1976-08-26 |
Family
ID=12067889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2189775A Pending JPS5197366A (ja) | 1975-02-24 | 1975-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5197366A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351037A (ja) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | 電子ビ−ム装置の陽極室 |
| WO2001069645A1 (fr) * | 2000-03-13 | 2001-09-20 | Ulvac, Inc. | Pompe ionique a projection |
-
1975
- 1975-02-24 JP JP2189775A patent/JPS5197366A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351037A (ja) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | 電子ビ−ム装置の陽極室 |
| JPH0577142B2 (ja) * | 1986-08-20 | 1993-10-26 | Tokyo Shibaura Electric Co | |
| WO2001069645A1 (fr) * | 2000-03-13 | 2001-09-20 | Ulvac, Inc. | Pompe ionique a projection |
| JP2001332209A (ja) * | 2000-03-13 | 2001-11-30 | Ulvac Japan Ltd | スパッタイオンポンプ |