JPS5196787A - - Google Patents
Info
- Publication number
- JPS5196787A JPS5196787A JP50021667A JP2166775A JPS5196787A JP S5196787 A JPS5196787 A JP S5196787A JP 50021667 A JP50021667 A JP 50021667A JP 2166775 A JP2166775 A JP 2166775A JP S5196787 A JPS5196787 A JP S5196787A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2166775A JPS555585B2 (ja) | 1975-02-21 | 1975-02-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2166775A JPS555585B2 (ja) | 1975-02-21 | 1975-02-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5196787A true JPS5196787A (ja) | 1976-08-25 |
JPS555585B2 JPS555585B2 (ja) | 1980-02-07 |
Family
ID=12061380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2166775A Expired JPS555585B2 (ja) | 1975-02-21 | 1975-02-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS555585B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5438156U (ja) * | 1977-08-19 | 1979-03-13 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494200A (ja) * | 1972-05-06 | 1974-01-14 |
-
1975
- 1975-02-21 JP JP2166775A patent/JPS555585B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494200A (ja) * | 1972-05-06 | 1974-01-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5438156U (ja) * | 1977-08-19 | 1979-03-13 | ||
JPS5928033Y2 (ja) * | 1977-08-19 | 1984-08-14 | 松下電器産業株式会社 | スパツタリング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS555585B2 (ja) | 1980-02-07 |