JPS5196787A - - Google Patents

Info

Publication number
JPS5196787A
JPS5196787A JP50021667A JP2166775A JPS5196787A JP S5196787 A JPS5196787 A JP S5196787A JP 50021667 A JP50021667 A JP 50021667A JP 2166775 A JP2166775 A JP 2166775A JP S5196787 A JPS5196787 A JP S5196787A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50021667A
Other versions
JPS555585B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2166775A priority Critical patent/JPS555585B2/ja
Publication of JPS5196787A publication Critical patent/JPS5196787A/ja
Publication of JPS555585B2 publication Critical patent/JPS555585B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2166775A 1975-02-21 1975-02-21 Expired JPS555585B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2166775A JPS555585B2 (ja) 1975-02-21 1975-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2166775A JPS555585B2 (ja) 1975-02-21 1975-02-21

Publications (2)

Publication Number Publication Date
JPS5196787A true JPS5196787A (ja) 1976-08-25
JPS555585B2 JPS555585B2 (ja) 1980-02-07

Family

ID=12061380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2166775A Expired JPS555585B2 (ja) 1975-02-21 1975-02-21

Country Status (1)

Country Link
JP (1) JPS555585B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438156U (ja) * 1977-08-19 1979-03-13

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494200A (ja) * 1972-05-06 1974-01-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494200A (ja) * 1972-05-06 1974-01-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438156U (ja) * 1977-08-19 1979-03-13
JPS5928033Y2 (ja) * 1977-08-19 1984-08-14 松下電器産業株式会社 スパツタリング装置

Also Published As

Publication number Publication date
JPS555585B2 (ja) 1980-02-07

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