JPS5193158A - - Google Patents

Info

Publication number
JPS5193158A
JPS5193158A JP50018577A JP1857775A JPS5193158A JP S5193158 A JPS5193158 A JP S5193158A JP 50018577 A JP50018577 A JP 50018577A JP 1857775 A JP1857775 A JP 1857775A JP S5193158 A JPS5193158 A JP S5193158A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50018577A
Other languages
Japanese (ja)
Other versions
JPS5741064B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50018577A priority Critical patent/JPS5741064B2/ja
Publication of JPS5193158A publication Critical patent/JPS5193158A/ja
Publication of JPS5741064B2 publication Critical patent/JPS5741064B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP50018577A 1975-02-13 1975-02-13 Expired JPS5741064B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50018577A JPS5741064B2 (cg-RX-API-DMAC7.html) 1975-02-13 1975-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50018577A JPS5741064B2 (cg-RX-API-DMAC7.html) 1975-02-13 1975-02-13

Publications (2)

Publication Number Publication Date
JPS5193158A true JPS5193158A (cg-RX-API-DMAC7.html) 1976-08-16
JPS5741064B2 JPS5741064B2 (cg-RX-API-DMAC7.html) 1982-09-01

Family

ID=11975467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50018577A Expired JPS5741064B2 (cg-RX-API-DMAC7.html) 1975-02-13 1975-02-13

Country Status (1)

Country Link
JP (1) JPS5741064B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder

Also Published As

Publication number Publication date
JPS5741064B2 (cg-RX-API-DMAC7.html) 1982-09-01

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