JPS5192183A - - Google Patents

Info

Publication number
JPS5192183A
JPS5192183A JP50017067A JP1706775A JPS5192183A JP S5192183 A JPS5192183 A JP S5192183A JP 50017067 A JP50017067 A JP 50017067A JP 1706775 A JP1706775 A JP 1706775A JP S5192183 A JPS5192183 A JP S5192183A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50017067A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50017067A priority Critical patent/JPS5192183A/ja
Publication of JPS5192183A publication Critical patent/JPS5192183A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
JP50017067A 1975-02-10 1975-02-10 Pending JPS5192183A (US20030220297A1-20031127-C00009.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50017067A JPS5192183A (US20030220297A1-20031127-C00009.png) 1975-02-10 1975-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50017067A JPS5192183A (US20030220297A1-20031127-C00009.png) 1975-02-10 1975-02-10

Publications (1)

Publication Number Publication Date
JPS5192183A true JPS5192183A (US20030220297A1-20031127-C00009.png) 1976-08-12

Family

ID=11933629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50017067A Pending JPS5192183A (US20030220297A1-20031127-C00009.png) 1975-02-10 1975-02-10

Country Status (1)

Country Link
JP (1) JPS5192183A (US20030220297A1-20031127-C00009.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS63257247A (ja) * 1987-04-14 1988-10-25 Fujitsu Ltd 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS63257247A (ja) * 1987-04-14 1988-10-25 Fujitsu Ltd 半導体装置の製造方法
JPH0573260B2 (US20030220297A1-20031127-C00009.png) * 1987-04-14 1993-10-14 Fujitsu Ltd

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