JPS5191459A - - Google Patents
Info
- Publication number
- JPS5191459A JPS5191459A JP50015364A JP1536475A JPS5191459A JP S5191459 A JPS5191459 A JP S5191459A JP 50015364 A JP50015364 A JP 50015364A JP 1536475 A JP1536475 A JP 1536475A JP S5191459 A JPS5191459 A JP S5191459A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Manipulator (AREA)
- Load-Engaging Elements For Cranes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50015364A JPS5191459A (ja) | 1975-02-07 | 1975-02-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50015364A JPS5191459A (ja) | 1975-02-07 | 1975-02-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5191459A true JPS5191459A (ja) | 1976-08-11 |
Family
ID=11886729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50015364A Pending JPS5191459A (ja) | 1975-02-07 | 1975-02-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5191459A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
JPS631647A (ja) * | 1986-06-23 | 1988-01-06 | Taiyo Tekko Kk | 無接触吸着装置 |
-
1975
- 1975-02-07 JP JP50015364A patent/JPS5191459A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
JPS6233182B2 (ja) * | 1985-04-27 | 1987-07-20 | Fujitsu Ltd | |
JPS631647A (ja) * | 1986-06-23 | 1988-01-06 | Taiyo Tekko Kk | 無接触吸着装置 |
JPH0343175B2 (ja) * | 1986-06-23 | 1991-07-01 | Taiyo Tekko Kk |