JPS5187970A - - Google Patents

Info

Publication number
JPS5187970A
JPS5187970A JP1257675A JP1257675A JPS5187970A JP S5187970 A JPS5187970 A JP S5187970A JP 1257675 A JP1257675 A JP 1257675A JP 1257675 A JP1257675 A JP 1257675A JP S5187970 A JPS5187970 A JP S5187970A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1257675A
Other languages
Japanese (ja)
Other versions
JPS5322424B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1257675A priority Critical patent/JPS5322424B2/ja
Publication of JPS5187970A publication Critical patent/JPS5187970A/ja
Publication of JPS5322424B2 publication Critical patent/JPS5322424B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1257675A 1975-01-31 1975-01-31 Expired JPS5322424B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257675A JPS5322424B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257675A JPS5322424B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5187970A true JPS5187970A (enrdf_load_stackoverflow) 1976-07-31
JPS5322424B2 JPS5322424B2 (enrdf_load_stackoverflow) 1978-07-08

Family

ID=11809176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257675A Expired JPS5322424B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS5322424B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638888A (en) * 1979-09-07 1981-04-14 Hitachi Ltd Pattern forming method
JPS60208832A (ja) * 1984-04-02 1985-10-21 Matsushita Electric Ind Co Ltd フオトマスクおよびこれを用いた半導体装置の製造方法
JPS61289351A (ja) * 1985-06-17 1986-12-19 Fujitsu Ltd パタ−ン可変型ホトマスク
JPH0643628A (ja) * 1993-03-22 1994-02-18 Hitachi Ltd レーザ光によるパターン刻印方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050096342A (ko) * 2004-03-30 2005-10-06 삼성전자주식회사 냉장고

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638888A (en) * 1979-09-07 1981-04-14 Hitachi Ltd Pattern forming method
JPS60208832A (ja) * 1984-04-02 1985-10-21 Matsushita Electric Ind Co Ltd フオトマスクおよびこれを用いた半導体装置の製造方法
JPS61289351A (ja) * 1985-06-17 1986-12-19 Fujitsu Ltd パタ−ン可変型ホトマスク
JPH0643628A (ja) * 1993-03-22 1994-02-18 Hitachi Ltd レーザ光によるパターン刻印方法

Also Published As

Publication number Publication date
JPS5322424B2 (enrdf_load_stackoverflow) 1978-07-08

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