JPS5186358A - Denshisensochiniokerubiimujukuawasehohooyobisochi - Google Patents

Denshisensochiniokerubiimujukuawasehohooyobisochi

Info

Publication number
JPS5186358A
JPS5186358A JP50011135A JP1113575A JPS5186358A JP S5186358 A JPS5186358 A JP S5186358A JP 50011135 A JP50011135 A JP 50011135A JP 1113575 A JP1113575 A JP 1113575A JP S5186358 A JPS5186358 A JP S5186358A
Authority
JP
Japan
Prior art keywords
denshisensochiniokerubiimujukuawasehohooyobisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50011135A
Other languages
English (en)
Japanese (ja)
Inventor
Osamu Nakamura
Tadayuki Tokuhisa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Nihon Denshi KK
Priority to JP50011135A priority Critical patent/JPS5186358A/ja
Publication of JPS5186358A publication Critical patent/JPS5186358A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP50011135A 1975-01-27 1975-01-27 Denshisensochiniokerubiimujukuawasehohooyobisochi Pending JPS5186358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50011135A JPS5186358A (en) 1975-01-27 1975-01-27 Denshisensochiniokerubiimujukuawasehohooyobisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50011135A JPS5186358A (en) 1975-01-27 1975-01-27 Denshisensochiniokerubiimujukuawasehohooyobisochi

Publications (1)

Publication Number Publication Date
JPS5186358A true JPS5186358A (en) 1976-07-28

Family

ID=11769564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50011135A Pending JPS5186358A (en) 1975-01-27 1975-01-27 Denshisensochiniokerubiimujukuawasehohooyobisochi

Country Status (1)

Country Link
JP (1) JPS5186358A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457950A (en) * 1977-10-18 1979-05-10 Erionikusu Kk Method of focusing in electron beam unit
JPH01183045A (ja) * 1988-01-08 1989-07-20 Jeol Ltd 電子ビームの最適化自動設定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (cs) * 1972-12-06 1974-07-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (cs) * 1972-12-06 1974-07-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457950A (en) * 1977-10-18 1979-05-10 Erionikusu Kk Method of focusing in electron beam unit
JPH01183045A (ja) * 1988-01-08 1989-07-20 Jeol Ltd 電子ビームの最適化自動設定装置

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