JPS5180763A - - Google Patents

Info

Publication number
JPS5180763A
JPS5180763A JP50004946A JP494675A JPS5180763A JP S5180763 A JPS5180763 A JP S5180763A JP 50004946 A JP50004946 A JP 50004946A JP 494675 A JP494675 A JP 494675A JP S5180763 A JPS5180763 A JP S5180763A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50004946A
Other languages
Japanese (ja)
Other versions
JPS5820456B2 (ja
Inventor
Shozo Kasai
Yasuo Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50004946A priority Critical patent/JPS5820456B2/ja
Publication of JPS5180763A publication Critical patent/JPS5180763A/ja
Publication of JPS5820456B2 publication Critical patent/JPS5820456B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP50004946A 1975-01-10 1975-01-10 リツタイソウサガタデンシケンビキヨウ Expired JPS5820456B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50004946A JPS5820456B2 (ja) 1975-01-10 1975-01-10 リツタイソウサガタデンシケンビキヨウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50004946A JPS5820456B2 (ja) 1975-01-10 1975-01-10 リツタイソウサガタデンシケンビキヨウ

Publications (2)

Publication Number Publication Date
JPS5180763A true JPS5180763A (enrdf_load_stackoverflow) 1976-07-14
JPS5820456B2 JPS5820456B2 (ja) 1983-04-23

Family

ID=11597727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50004946A Expired JPS5820456B2 (ja) 1975-01-10 1975-01-10 リツタイソウサガタデンシケンビキヨウ

Country Status (1)

Country Link
JP (1) JPS5820456B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
WO2013103090A1 (ja) * 2012-01-06 2013-07-11 株式会社 日立ハイテクノロジーズ 荷電粒子線装置および傾斜観察画像表示方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
WO2013103090A1 (ja) * 2012-01-06 2013-07-11 株式会社 日立ハイテクノロジーズ 荷電粒子線装置および傾斜観察画像表示方法
JP2013143197A (ja) * 2012-01-06 2013-07-22 Hitachi High-Technologies Corp 荷電粒子線装置および傾斜観察画像表示方法
CN104040676A (zh) * 2012-01-06 2014-09-10 株式会社日立高新技术 带电粒子线装置以及倾斜观察图像显示方法
CN104040676B (zh) * 2012-01-06 2016-03-16 株式会社日立高新技术 带电粒子线装置以及倾斜观察图像显示方法

Also Published As

Publication number Publication date
JPS5820456B2 (ja) 1983-04-23

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