JPS5180631A - Etsuchinguzai - Google Patents

Etsuchinguzai

Info

Publication number
JPS5180631A
JPS5180631A JP489175A JP489175A JPS5180631A JP S5180631 A JPS5180631 A JP S5180631A JP 489175 A JP489175 A JP 489175A JP 489175 A JP489175 A JP 489175A JP S5180631 A JPS5180631 A JP S5180631A
Authority
JP
Japan
Prior art keywords
etsuching
uzai
etsuching uzai
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP489175A
Other languages
English (en)
Inventor
Kuniaki Tsurushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP489175A priority Critical patent/JPS5180631A/ja
Publication of JPS5180631A publication Critical patent/JPS5180631A/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP489175A 1975-01-10 1975-01-10 Etsuchinguzai Pending JPS5180631A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP489175A JPS5180631A (ja) 1975-01-10 1975-01-10 Etsuchinguzai

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP489175A JPS5180631A (ja) 1975-01-10 1975-01-10 Etsuchinguzai

Publications (1)

Publication Number Publication Date
JPS5180631A true JPS5180631A (ja) 1976-07-14

Family

ID=11596287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP489175A Pending JPS5180631A (ja) 1975-01-10 1975-01-10 Etsuchinguzai

Country Status (1)

Country Link
JP (1) JPS5180631A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311469A (ja) * 1990-04-30 1993-11-22 Internatl Business Mach Corp <Ibm> モリブデンまたはタングステンのための効果的な中性に近いｐＨのエッチング溶液
EP3851554A1 (de) * 2020-01-14 2021-07-21 RENA Technologies Austria GmbH Verfahren zum ätzen oder auflösen einer hartstoffbeschichtung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311469A (ja) * 1990-04-30 1993-11-22 Internatl Business Mach Corp <Ibm> モリブデンまたはタングステンのための効果的な中性に近いｐＨのエッチング溶液
EP3851554A1 (de) * 2020-01-14 2021-07-21 RENA Technologies Austria GmbH Verfahren zum ätzen oder auflösen einer hartstoffbeschichtung
WO2021144375A1 (de) * 2020-01-14 2021-07-22 RENA Technologies Austria GmbH Verfahren zum ätzen oder auflösen einer hartstoffbeschichtung

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