JPS5179650A - Supatsutaetsuchingusochi - Google Patents

Supatsutaetsuchingusochi

Info

Publication number
JPS5179650A
JPS5179650A JP437375A JP437375A JPS5179650A JP S5179650 A JPS5179650 A JP S5179650A JP 437375 A JP437375 A JP 437375A JP 437375 A JP437375 A JP 437375A JP S5179650 A JPS5179650 A JP S5179650A
Authority
JP
Japan
Prior art keywords
supatsutaetsu
chingusochi
supatsutaetsu chingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP437375A
Other languages
English (en)
Inventor
Hideo Matsuzaki
Masayoshi Misono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP437375A priority Critical patent/JPS5179650A/ja
Publication of JPS5179650A publication Critical patent/JPS5179650A/ja
Pending legal-status Critical Current

Links

JP437375A 1975-01-08 1975-01-08 Supatsutaetsuchingusochi Pending JPS5179650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP437375A JPS5179650A (ja) 1975-01-08 1975-01-08 Supatsutaetsuchingusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP437375A JPS5179650A (ja) 1975-01-08 1975-01-08 Supatsutaetsuchingusochi

Publications (1)

Publication Number Publication Date
JPS5179650A true JPS5179650A (ja) 1976-07-12

Family

ID=11582549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP437375A Pending JPS5179650A (ja) 1975-01-08 1975-01-08 Supatsutaetsuchingusochi

Country Status (1)

Country Link
JP (1) JPS5179650A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57202734A (en) * 1981-06-09 1982-12-11 Matsushita Electric Ind Co Ltd Method and device for manufacturing of semiconductor
JPH02260632A (ja) * 1989-03-31 1990-10-23 Tokyo Electron Ltd プラズマ処理装置
JPH0610163A (ja) * 1992-02-13 1994-01-18 Hughes Aircraft Co 固体の厚さプロフィルを変更するためのプログラムされたプラズマエッチング装置の運動装置
JPH0617267A (ja) * 1992-03-23 1994-01-25 Hughes Aircraft Co プラズマ補助化学エッチングにおける可変空間周波数制御方法および装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57202734A (en) * 1981-06-09 1982-12-11 Matsushita Electric Ind Co Ltd Method and device for manufacturing of semiconductor
JPH0423416B2 (ja) * 1981-06-09 1992-04-22 Matsushita Electric Ind Co Ltd
JPH02260632A (ja) * 1989-03-31 1990-10-23 Tokyo Electron Ltd プラズマ処理装置
JPH0610163A (ja) * 1992-02-13 1994-01-18 Hughes Aircraft Co 固体の厚さプロフィルを変更するためのプログラムされたプラズマエッチング装置の運動装置
JPH0617267A (ja) * 1992-03-23 1994-01-25 Hughes Aircraft Co プラズマ補助化学エッチングにおける可変空間周波数制御方法および装置

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