JPS5176074A - Handotaiuehaasenjosochi - Google Patents
HandotaiuehaasenjosochiInfo
- Publication number
- JPS5176074A JPS5176074A JP71675A JP71675A JPS5176074A JP S5176074 A JPS5176074 A JP S5176074A JP 71675 A JP71675 A JP 71675A JP 71675 A JP71675 A JP 71675A JP S5176074 A JPS5176074 A JP S5176074A
- Authority
- JP
- Japan
- Prior art keywords
- josochi
- handotaiuehaasen
- handotaiuehaasen josochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP71675A JPS5176074A (ja) | 1974-12-26 | 1974-12-26 | Handotaiuehaasenjosochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP71675A JPS5176074A (ja) | 1974-12-26 | 1974-12-26 | Handotaiuehaasenjosochi |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5176074A true JPS5176074A (ja) | 1976-07-01 |
Family
ID=11481474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP71675A Pending JPS5176074A (ja) | 1974-12-26 | 1974-12-26 | Handotaiuehaasenjosochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5176074A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501257A (ja) * | 1980-03-06 | 1982-07-15 | ||
JPH01210092A (ja) * | 1988-02-18 | 1989-08-23 | Sonitsuku Fueroo Kk | 精密洗浄の乾燥方法 |
JPH0555547U (ja) * | 1991-12-25 | 1993-07-23 | 大日本スクリーン製造株式会社 | 基板表面処理装置の温純水供給装置 |
-
1974
- 1974-12-26 JP JP71675A patent/JPS5176074A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501257A (ja) * | 1980-03-06 | 1982-07-15 | ||
JPH01210092A (ja) * | 1988-02-18 | 1989-08-23 | Sonitsuku Fueroo Kk | 精密洗浄の乾燥方法 |
JPH0448515B2 (ja) * | 1988-02-18 | 1992-08-06 | Sonic Ferro Kk | |
JPH0555547U (ja) * | 1991-12-25 | 1993-07-23 | 大日本スクリーン製造株式会社 | 基板表面処理装置の温純水供給装置 |
JP2534385Y2 (ja) * | 1991-12-25 | 1997-04-30 | 大日本スクリーン製造株式会社 | 基板表面処理装置の温純水供給装置 |
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