JPS5173981A - - Google Patents

Info

Publication number
JPS5173981A
JPS5173981A JP49148108A JP14810874A JPS5173981A JP S5173981 A JPS5173981 A JP S5173981A JP 49148108 A JP49148108 A JP 49148108A JP 14810874 A JP14810874 A JP 14810874A JP S5173981 A JPS5173981 A JP S5173981A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49148108A
Other languages
Japanese (ja)
Other versions
JPS5621068B2 (de
Inventor
Ensei Ko
Kazuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP14810874A priority Critical patent/JPS5621068B2/ja
Publication of JPS5173981A publication Critical patent/JPS5173981A/ja
Publication of JPS5621068B2 publication Critical patent/JPS5621068B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
JP14810874A 1974-12-25 1974-12-25 Expired JPS5621068B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14810874A JPS5621068B2 (de) 1974-12-25 1974-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14810874A JPS5621068B2 (de) 1974-12-25 1974-12-25

Publications (2)

Publication Number Publication Date
JPS5173981A true JPS5173981A (de) 1976-06-26
JPS5621068B2 JPS5621068B2 (de) 1981-05-16

Family

ID=15445416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14810874A Expired JPS5621068B2 (de) 1974-12-25 1974-12-25

Country Status (1)

Country Link
JP (1) JPS5621068B2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method
JPS54139891A (en) * 1978-04-24 1979-10-30 Nagaoka Kk Specific work metal material and its manufacturing method
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495836A (de) * 1973-03-20 1974-01-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495836A (de) * 1973-03-20 1974-01-19

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method
JPS54139891A (en) * 1978-04-24 1979-10-30 Nagaoka Kk Specific work metal material and its manufacturing method
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法
JPH0237426B2 (de) * 1984-05-04 1990-08-24 Diesel Kiki Co

Also Published As

Publication number Publication date
JPS5621068B2 (de) 1981-05-16

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