JPS5173981A - - Google Patents
Info
- Publication number
- JPS5173981A JPS5173981A JP49148108A JP14810874A JPS5173981A JP S5173981 A JPS5173981 A JP S5173981A JP 49148108 A JP49148108 A JP 49148108A JP 14810874 A JP14810874 A JP 14810874A JP S5173981 A JPS5173981 A JP S5173981A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14810874A JPS5621068B2 (de) | 1974-12-25 | 1974-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14810874A JPS5621068B2 (de) | 1974-12-25 | 1974-12-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5173981A true JPS5173981A (de) | 1976-06-26 |
JPS5621068B2 JPS5621068B2 (de) | 1981-05-16 |
Family
ID=15445416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14810874A Expired JPS5621068B2 (de) | 1974-12-25 | 1974-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5621068B2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138989A (en) * | 1977-05-10 | 1978-12-04 | Koyo Seiko Co | Ion plating method |
JPS54139891A (en) * | 1978-04-24 | 1979-10-30 | Nagaoka Kk | Specific work metal material and its manufacturing method |
JPS60234965A (ja) * | 1984-05-04 | 1985-11-21 | Diesel Kiki Co Ltd | 薄膜製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495836A (de) * | 1973-03-20 | 1974-01-19 |
-
1974
- 1974-12-25 JP JP14810874A patent/JPS5621068B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495836A (de) * | 1973-03-20 | 1974-01-19 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138989A (en) * | 1977-05-10 | 1978-12-04 | Koyo Seiko Co | Ion plating method |
JPS54139891A (en) * | 1978-04-24 | 1979-10-30 | Nagaoka Kk | Specific work metal material and its manufacturing method |
JPS60234965A (ja) * | 1984-05-04 | 1985-11-21 | Diesel Kiki Co Ltd | 薄膜製造方法 |
JPH0237426B2 (de) * | 1984-05-04 | 1990-08-24 | Diesel Kiki Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5621068B2 (de) | 1981-05-16 |