JPS5170254U - - Google Patents
Info
- Publication number
- JPS5170254U JPS5170254U JP14338974U JP14338974U JPS5170254U JP S5170254 U JPS5170254 U JP S5170254U JP 14338974 U JP14338974 U JP 14338974U JP 14338974 U JP14338974 U JP 14338974U JP S5170254 U JPS5170254 U JP S5170254U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338974U JPS5170254U (enExample) | 1974-11-29 | 1974-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338974U JPS5170254U (enExample) | 1974-11-29 | 1974-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5170254U true JPS5170254U (enExample) | 1976-06-03 |
Family
ID=28426371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14338974U Pending JPS5170254U (enExample) | 1974-11-29 | 1974-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5170254U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179777A (ja) * | 1983-03-30 | 1984-10-12 | Ulvac Corp | 連続薄膜形成装置に於けるパタ−ン形成装置 |
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1974
- 1974-11-29 JP JP14338974U patent/JPS5170254U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179777A (ja) * | 1983-03-30 | 1984-10-12 | Ulvac Corp | 連続薄膜形成装置に於けるパタ−ン形成装置 |