JPS5170254U - - Google Patents

Info

Publication number
JPS5170254U
JPS5170254U JP14338974U JP14338974U JPS5170254U JP S5170254 U JPS5170254 U JP S5170254U JP 14338974 U JP14338974 U JP 14338974U JP 14338974 U JP14338974 U JP 14338974U JP S5170254 U JPS5170254 U JP S5170254U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14338974U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14338974U priority Critical patent/JPS5170254U/ja
Publication of JPS5170254U publication Critical patent/JPS5170254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14338974U 1974-11-29 1974-11-29 Pending JPS5170254U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14338974U JPS5170254U (enrdf_load_stackoverflow) 1974-11-29 1974-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14338974U JPS5170254U (enrdf_load_stackoverflow) 1974-11-29 1974-11-29

Publications (1)

Publication Number Publication Date
JPS5170254U true JPS5170254U (enrdf_load_stackoverflow) 1976-06-03

Family

ID=28426371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14338974U Pending JPS5170254U (enrdf_load_stackoverflow) 1974-11-29 1974-11-29

Country Status (1)

Country Link
JP (1) JPS5170254U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179777A (ja) * 1983-03-30 1984-10-12 Ulvac Corp 連続薄膜形成装置に於けるパタ−ン形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179777A (ja) * 1983-03-30 1984-10-12 Ulvac Corp 連続薄膜形成装置に於けるパタ−ン形成装置

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