JPS5167071A - - Google Patents
Info
- Publication number
- JPS5167071A JPS5167071A JP14135874A JP14135874A JPS5167071A JP S5167071 A JPS5167071 A JP S5167071A JP 14135874 A JP14135874 A JP 14135874A JP 14135874 A JP14135874 A JP 14135874A JP S5167071 A JPS5167071 A JP S5167071A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14135874A JPS5167071A (ja) | 1974-12-09 | 1974-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14135874A JPS5167071A (ja) | 1974-12-09 | 1974-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5167071A true JPS5167071A (ja) | 1976-06-10 |
Family
ID=15290110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14135874A Pending JPS5167071A (ja) | 1974-12-09 | 1974-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5167071A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842230A (ja) * | 1981-09-07 | 1983-03-11 | Oki Electric Ind Co Ltd | 半導体ウエハを用いた写真の製造方法 |
| JPS62189468A (ja) * | 1986-02-17 | 1987-08-19 | Hitachi Ltd | ホトマスク，及びそれを用いた投影露光方法、並びにホトマスクの製造方法 |
-
1974
- 1974-12-09 JP JP14135874A patent/JPS5167071A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842230A (ja) * | 1981-09-07 | 1983-03-11 | Oki Electric Ind Co Ltd | 半導体ウエハを用いた写真の製造方法 |
| JPS62189468A (ja) * | 1986-02-17 | 1987-08-19 | Hitachi Ltd | ホトマスク，及びそれを用いた投影露光方法、並びにホトマスクの製造方法 |
| JPH0690507B2 (ja) * | 1986-02-17 | 1994-11-14 | 株式会社日立製作所 | ホトマスク，及びそれを用いた投影露光方法、並びにホトマスクの製造方法 |