JPS516657A - - Google Patents

Info

Publication number
JPS516657A
JPS516657A JP49077668A JP7766874A JPS516657A JP S516657 A JPS516657 A JP S516657A JP 49077668 A JP49077668 A JP 49077668A JP 7766874 A JP7766874 A JP 7766874A JP S516657 A JPS516657 A JP S516657A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49077668A
Other languages
Japanese (ja)
Other versions
JPS5918824B2 (ja
Inventor
Shuji Asaba
Kadode Okumura
Takeo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP49077668A priority Critical patent/JPS5918824B2/ja
Publication of JPS516657A publication Critical patent/JPS516657A/ja
Publication of JPS5918824B2 publication Critical patent/JPS5918824B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP49077668A 1974-07-05 1974-07-05 露光装置 Expired JPS5918824B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49077668A JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49077668A JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Publications (2)

Publication Number Publication Date
JPS516657A true JPS516657A (cs) 1976-01-20
JPS5918824B2 JPS5918824B2 (ja) 1984-05-01

Family

ID=13640251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49077668A Expired JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Country Status (1)

Country Link
JP (1) JPS5918824B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010253A (ja) * 1983-06-29 1985-01-19 Dainippon Screen Mfg Co Ltd 焼付装置
JPS6219649U (cs) * 1985-07-18 1987-02-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010253A (ja) * 1983-06-29 1985-01-19 Dainippon Screen Mfg Co Ltd 焼付装置
JPS6219649U (cs) * 1985-07-18 1987-02-05

Also Published As

Publication number Publication date
JPS5918824B2 (ja) 1984-05-01

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