JPS5165366A - SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO - Google Patents

SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO

Info

Publication number
JPS5165366A
JPS5165366A JP13897374A JP13897374A JPS5165366A JP S5165366 A JPS5165366 A JP S5165366A JP 13897374 A JP13897374 A JP 13897374A JP 13897374 A JP13897374 A JP 13897374A JP S5165366 A JPS5165366 A JP S5165366A
Authority
JP
Japan
Prior art keywords
sankabutsutomeidodenmakuno
etsuchinguhoho
sankabutsutomeidodenmakuno etsuchinguhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13897374A
Other languages
Japanese (ja)
Inventor
Masataka Matsura
Yasuhiko Inami
Sadatoshi Takechi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP13897374A priority Critical patent/JPS5165366A/en
Publication of JPS5165366A publication Critical patent/JPS5165366A/en
Pending legal-status Critical Current

Links

JP13897374A 1974-12-03 1974-12-03 SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO Pending JPS5165366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13897374A JPS5165366A (en) 1974-12-03 1974-12-03 SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13897374A JPS5165366A (en) 1974-12-03 1974-12-03 SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO

Publications (1)

Publication Number Publication Date
JPS5165366A true JPS5165366A (en) 1976-06-05

Family

ID=15234489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13897374A Pending JPS5165366A (en) 1974-12-03 1974-12-03 SANKABUTSUTOMEIDODENMAKUNO ETSUCHINGUHOHO

Country Status (1)

Country Link
JP (1) JPS5165366A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108493152A (en) * 2017-02-13 2018-09-04 朗姆研究公司 The method for creating air gap

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4828969A (en) * 1971-08-20 1973-04-17
JPS5028919A (en) * 1973-07-13 1975-03-24
JPS54879A (en) * 1977-06-03 1979-01-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mis transistor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4828969A (en) * 1971-08-20 1973-04-17
JPS5028919A (en) * 1973-07-13 1975-03-24
JPS54879A (en) * 1977-06-03 1979-01-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mis transistor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108493152A (en) * 2017-02-13 2018-09-04 朗姆研究公司 The method for creating air gap
CN108493152B (en) * 2017-02-13 2024-03-08 朗姆研究公司 Method for creating an air gap

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