JPS5160577A - HANDOTAIATSURYOKUKENSHUTSUKI - Google Patents

HANDOTAIATSURYOKUKENSHUTSUKI

Info

Publication number
JPS5160577A
JPS5160577A JP13568874A JP13568874A JPS5160577A JP S5160577 A JPS5160577 A JP S5160577A JP 13568874 A JP13568874 A JP 13568874A JP 13568874 A JP13568874 A JP 13568874A JP S5160577 A JPS5160577 A JP S5160577A
Authority
JP
Japan
Prior art keywords
handotaiatsuryokukenshutsuki
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13568874A
Other languages
Japanese (ja)
Inventor
Shunji Shiromizu
Shozo Sato
Tadahiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13568874A priority Critical patent/JPS5160577A/en
Publication of JPS5160577A publication Critical patent/JPS5160577A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP13568874A 1974-11-25 1974-11-25 HANDOTAIATSURYOKUKENSHUTSUKI Pending JPS5160577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13568874A JPS5160577A (en) 1974-11-25 1974-11-25 HANDOTAIATSURYOKUKENSHUTSUKI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13568874A JPS5160577A (en) 1974-11-25 1974-11-25 HANDOTAIATSURYOKUKENSHUTSUKI

Publications (1)

Publication Number Publication Date
JPS5160577A true JPS5160577A (en) 1976-05-26

Family

ID=15157577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13568874A Pending JPS5160577A (en) 1974-11-25 1974-11-25 HANDOTAIATSURYOKUKENSHUTSUKI

Country Status (1)

Country Link
JP (1) JPS5160577A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142956A (en) * 1984-08-06 1986-03-01 Nec Corp Pressure sensor
JPS61172378A (en) * 1985-01-28 1986-08-04 Nec Corp Pressure sensor
JPH02256278A (en) * 1987-04-10 1990-10-17 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH04184232A (en) * 1990-11-20 1992-07-01 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH06167351A (en) * 1991-06-27 1994-06-14 Dresser Ind Inc Control method of nonlinearity of change device
JPH08293617A (en) * 1995-04-24 1996-11-05 Nippondenso Co Ltd Semiconductor device and manufacturing method thereof
JPH08334424A (en) * 1995-06-07 1996-12-17 Mitsubishi Electric Corp Semiconductor pressure detecting device
JP2005043351A (en) * 2003-07-04 2005-02-17 Robert Bosch Gmbh Micro-machining type pressure sensor
JP2009027733A (en) * 2008-08-25 2009-02-05 Yamaha Corp Method of manufacturing capacitor microphone
US7932117B2 (en) 2006-07-10 2011-04-26 Yamaha Corporation Pressure sensor and manufacturing method therefor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142956A (en) * 1984-08-06 1986-03-01 Nec Corp Pressure sensor
JPS61172378A (en) * 1985-01-28 1986-08-04 Nec Corp Pressure sensor
JPH02256278A (en) * 1987-04-10 1990-10-17 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH04184232A (en) * 1990-11-20 1992-07-01 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH06167351A (en) * 1991-06-27 1994-06-14 Dresser Ind Inc Control method of nonlinearity of change device
JPH08293617A (en) * 1995-04-24 1996-11-05 Nippondenso Co Ltd Semiconductor device and manufacturing method thereof
JPH08334424A (en) * 1995-06-07 1996-12-17 Mitsubishi Electric Corp Semiconductor pressure detecting device
JP2005043351A (en) * 2003-07-04 2005-02-17 Robert Bosch Gmbh Micro-machining type pressure sensor
US7932117B2 (en) 2006-07-10 2011-04-26 Yamaha Corporation Pressure sensor and manufacturing method therefor
JP2009027733A (en) * 2008-08-25 2009-02-05 Yamaha Corp Method of manufacturing capacitor microphone

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