JPS5160447A - Epitakisharuseichoho - Google Patents

Epitakisharuseichoho

Info

Publication number
JPS5160447A
JPS5160447A JP13430774A JP13430774A JPS5160447A JP S5160447 A JPS5160447 A JP S5160447A JP 13430774 A JP13430774 A JP 13430774A JP 13430774 A JP13430774 A JP 13430774A JP S5160447 A JPS5160447 A JP S5160447A
Authority
JP
Japan
Prior art keywords
epitakisharuseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13430774A
Other languages
English (en)
Inventor
Hiroshi Ikeda
Hideo Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13430774A priority Critical patent/JPS5160447A/ja
Publication of JPS5160447A publication Critical patent/JPS5160447A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP13430774A 1974-11-25 1974-11-25 Epitakisharuseichoho Pending JPS5160447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13430774A JPS5160447A (ja) 1974-11-25 1974-11-25 Epitakisharuseichoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13430774A JPS5160447A (ja) 1974-11-25 1974-11-25 Epitakisharuseichoho

Publications (1)

Publication Number Publication Date
JPS5160447A true JPS5160447A (ja) 1976-05-26

Family

ID=15125220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13430774A Pending JPS5160447A (ja) 1974-11-25 1974-11-25 Epitakisharuseichoho

Country Status (1)

Country Link
JP (1) JPS5160447A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153196A (ja) * 1984-08-24 1986-03-17 Fujitsu Ltd シリコンのエピタキシヤル成長法
JPS6364993A (ja) * 1986-09-08 1988-03-23 Res Dev Corp Of Japan 元素半導体単結晶薄膜の成長方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
J. ELECTROCHEM. SOC.#N3=1971 *
J. ELECTROCHEM. SOC.#N8=1972 *
SOLID STATE TECHNOLOGY#M10=1972 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153196A (ja) * 1984-08-24 1986-03-17 Fujitsu Ltd シリコンのエピタキシヤル成長法
JPS6364993A (ja) * 1986-09-08 1988-03-23 Res Dev Corp Of Japan 元素半導体単結晶薄膜の成長方法

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