JPS5160447A - Epitakisharuseichoho - Google Patents
EpitakisharuseichohoInfo
- Publication number
- JPS5160447A JPS5160447A JP13430774A JP13430774A JPS5160447A JP S5160447 A JPS5160447 A JP S5160447A JP 13430774 A JP13430774 A JP 13430774A JP 13430774 A JP13430774 A JP 13430774A JP S5160447 A JPS5160447 A JP S5160447A
- Authority
- JP
- Japan
- Prior art keywords
- epitakisharuseichoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13430774A JPS5160447A (ja) | 1974-11-25 | 1974-11-25 | Epitakisharuseichoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13430774A JPS5160447A (ja) | 1974-11-25 | 1974-11-25 | Epitakisharuseichoho |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5160447A true JPS5160447A (ja) | 1976-05-26 |
Family
ID=15125220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13430774A Pending JPS5160447A (ja) | 1974-11-25 | 1974-11-25 | Epitakisharuseichoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5160447A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6153196A (ja) * | 1984-08-24 | 1986-03-17 | Fujitsu Ltd | シリコンのエピタキシヤル成長法 |
JPS6364993A (ja) * | 1986-09-08 | 1988-03-23 | Res Dev Corp Of Japan | 元素半導体単結晶薄膜の成長方法 |
-
1974
- 1974-11-25 JP JP13430774A patent/JPS5160447A/ja active Pending
Non-Patent Citations (3)
Title |
---|
J. ELECTROCHEM. SOC.#N3=1971 * |
J. ELECTROCHEM. SOC.#N8=1972 * |
SOLID STATE TECHNOLOGY#M10=1972 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6153196A (ja) * | 1984-08-24 | 1986-03-17 | Fujitsu Ltd | シリコンのエピタキシヤル成長法 |
JPS6364993A (ja) * | 1986-09-08 | 1988-03-23 | Res Dev Corp Of Japan | 元素半導体単結晶薄膜の成長方法 |
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