JPS5160165A - Teionpurazuma nyoru kobunshihimakuno jokyoho - Google Patents

Teionpurazuma nyoru kobunshihimakuno jokyoho

Info

Publication number
JPS5160165A
JPS5160165A JP13364874A JP13364874A JPS5160165A JP S5160165 A JPS5160165 A JP S5160165A JP 13364874 A JP13364874 A JP 13364874A JP 13364874 A JP13364874 A JP 13364874A JP S5160165 A JPS5160165 A JP S5160165A
Authority
JP
Japan
Prior art keywords
teionpurazuma
kobunshihimakuno
jokyoho
nyoru
teionpurazuma nyoru
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13364874A
Other languages
Japanese (ja)
Other versions
JPS5324302B2 (en
Inventor
Hiroshi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13364874A priority Critical patent/JPS5160165A/en
Publication of JPS5160165A publication Critical patent/JPS5160165A/en
Publication of JPS5324302B2 publication Critical patent/JPS5324302B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP13364874A 1974-11-22 1974-11-22 Teionpurazuma nyoru kobunshihimakuno jokyoho Granted JPS5160165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13364874A JPS5160165A (en) 1974-11-22 1974-11-22 Teionpurazuma nyoru kobunshihimakuno jokyoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13364874A JPS5160165A (en) 1974-11-22 1974-11-22 Teionpurazuma nyoru kobunshihimakuno jokyoho

Publications (2)

Publication Number Publication Date
JPS5160165A true JPS5160165A (en) 1976-05-25
JPS5324302B2 JPS5324302B2 (en) 1978-07-20

Family

ID=15109703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13364874A Granted JPS5160165A (en) 1974-11-22 1974-11-22 Teionpurazuma nyoru kobunshihimakuno jokyoho

Country Status (1)

Country Link
JP (1) JPS5160165A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153723A (en) * 1984-08-23 1986-03-17 Fujitsu Ltd Resist separating method
JPS61123143A (en) * 1984-11-19 1986-06-11 Fujitsu Ltd Resist ashing method and apparatus for the same
JPS6240730A (en) * 1985-08-15 1987-02-21 Canon Inc Ultraviolet ozone processor
JPS6370429A (en) * 1986-09-11 1988-03-30 Tokyo Electron Ltd Ashing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153723A (en) * 1984-08-23 1986-03-17 Fujitsu Ltd Resist separating method
JPS61123143A (en) * 1984-11-19 1986-06-11 Fujitsu Ltd Resist ashing method and apparatus for the same
JPS6240730A (en) * 1985-08-15 1987-02-21 Canon Inc Ultraviolet ozone processor
JPS6370429A (en) * 1986-09-11 1988-03-30 Tokyo Electron Ltd Ashing apparatus

Also Published As

Publication number Publication date
JPS5324302B2 (en) 1978-07-20

Similar Documents

Publication Publication Date Title
CS751075A2 (en) Zpusob vyroby novych heterocyklickych sloucenin
JPS5113042A (en) Jizaitsugiteno danseifusasochi
CS62475A2 (en) Elektricky stroj chlazeny plynem
JPS5115705A (en) Kyukibenojushinai fukunenshoshitsukaranaru nainenkikan
AU8747775A (en) 1-substituted-4-benzylidenepiperidines
IL47424A (en) 8-thiomethylergolines
GB1489305A (en) Fluid-oscillator
GB1484787A (en) N-heterocyclic-substituted-3-quinoline-carboxamides
CS621475A2 (en) Zpusob soucasneho stanoveni nekolika nebo vsech isoenzymu laktatdihydrogenazy
AU8751375A (en) 3-chloro-2-oxazolidinones
GB1482343A (en) Carbonyl-aldiminomethanephosphonates
JPS5118817A (en) Hanabiuchiagekyono denshishikitenkasochi
AU8166575A (en) 11-deoxy-13-dihydro-prostaglandin-9-ketals
AU8677475A (en) Phenylethanolamines
AU8349775A (en) Beer-wort
AU8270675A (en) 17-beta-hydroxy-androst-4-en-3-ones
CS324775A2 (en) Zpusob vyroby ferromagnetickeho kyslicniku chromiciteho
AU8582275A (en) Aptiperspirant
JPS5160165A (en) Teionpurazuma nyoru kobunshihimakuno jokyoho
JPS5120423A (en) Tetsukotsukozono hashiratoharino setsugohoho
AU8446875A (en) Diisocyanatodiketenes
AU8421275A (en) D-homo-steroids
JPS5114549A (en) Nainenkikanno purezaasochi
JPS5113102A (en) Haidobanno jidoseigyosochi
JPS5116618A (en) Arukirubenzenno seizohoho