JPS5160165A - Teionpurazuma nyoru kobunshihimakuno jokyoho - Google Patents
Teionpurazuma nyoru kobunshihimakuno jokyohoInfo
- Publication number
- JPS5160165A JPS5160165A JP13364874A JP13364874A JPS5160165A JP S5160165 A JPS5160165 A JP S5160165A JP 13364874 A JP13364874 A JP 13364874A JP 13364874 A JP13364874 A JP 13364874A JP S5160165 A JPS5160165 A JP S5160165A
- Authority
- JP
- Japan
- Prior art keywords
- teionpurazuma
- kobunshihimakuno
- jokyoho
- nyoru
- teionpurazuma nyoru
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13364874A JPS5160165A (en) | 1974-11-22 | 1974-11-22 | Teionpurazuma nyoru kobunshihimakuno jokyoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13364874A JPS5160165A (en) | 1974-11-22 | 1974-11-22 | Teionpurazuma nyoru kobunshihimakuno jokyoho |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5160165A true JPS5160165A (en) | 1976-05-25 |
JPS5324302B2 JPS5324302B2 (en) | 1978-07-20 |
Family
ID=15109703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13364874A Granted JPS5160165A (en) | 1974-11-22 | 1974-11-22 | Teionpurazuma nyoru kobunshihimakuno jokyoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5160165A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6153723A (en) * | 1984-08-23 | 1986-03-17 | Fujitsu Ltd | Resist separating method |
JPS61123143A (en) * | 1984-11-19 | 1986-06-11 | Fujitsu Ltd | Resist ashing method and apparatus for the same |
JPS6240730A (en) * | 1985-08-15 | 1987-02-21 | Canon Inc | Ultraviolet ozone processor |
JPS6370429A (en) * | 1986-09-11 | 1988-03-30 | Tokyo Electron Ltd | Ashing apparatus |
-
1974
- 1974-11-22 JP JP13364874A patent/JPS5160165A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6153723A (en) * | 1984-08-23 | 1986-03-17 | Fujitsu Ltd | Resist separating method |
JPS61123143A (en) * | 1984-11-19 | 1986-06-11 | Fujitsu Ltd | Resist ashing method and apparatus for the same |
JPS6240730A (en) * | 1985-08-15 | 1987-02-21 | Canon Inc | Ultraviolet ozone processor |
JPS6370429A (en) * | 1986-09-11 | 1988-03-30 | Tokyo Electron Ltd | Ashing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5324302B2 (en) | 1978-07-20 |
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