JPS5157330U - - Google Patents
Info
- Publication number
- JPS5157330U JPS5157330U JP13197874U JP13197874U JPS5157330U JP S5157330 U JPS5157330 U JP S5157330U JP 13197874 U JP13197874 U JP 13197874U JP 13197874 U JP13197874 U JP 13197874U JP S5157330 U JPS5157330 U JP S5157330U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Induction Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13197874U JPS5157330U (ja) | 1974-10-31 | 1974-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13197874U JPS5157330U (ja) | 1974-10-31 | 1974-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5157330U true JPS5157330U (ja) | 1976-05-06 |
Family
ID=28394346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13197874U Pending JPS5157330U (ja) | 1974-10-31 | 1974-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5157330U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014229426A (ja) * | 2013-05-21 | 2014-12-08 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| JP2015173027A (ja) * | 2014-03-11 | 2015-10-01 | 東京エレクトロン株式会社 | プラズマ処理装置 |
-
1974
- 1974-10-31 JP JP13197874U patent/JPS5157330U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014229426A (ja) * | 2013-05-21 | 2014-12-08 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| KR20160013002A (ko) * | 2013-05-21 | 2016-02-03 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
| JP2015173027A (ja) * | 2014-03-11 | 2015-10-01 | 東京エレクトロン株式会社 | プラズマ処理装置 |