JPS5156178A - - Google Patents
Info
- Publication number
- JPS5156178A JPS5156178A JP13033374A JP13033374A JPS5156178A JP S5156178 A JPS5156178 A JP S5156178A JP 13033374 A JP13033374 A JP 13033374A JP 13033374 A JP13033374 A JP 13033374A JP S5156178 A JPS5156178 A JP S5156178A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49130333A JPS5931063B2 (ja) | 1974-11-12 | 1974-11-12 | フオトマスク用ブランク板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49130333A JPS5931063B2 (ja) | 1974-11-12 | 1974-11-12 | フオトマスク用ブランク板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5156178A true JPS5156178A (xx) | 1976-05-17 |
| JPS5931063B2 JPS5931063B2 (ja) | 1984-07-31 |
Family
ID=15031842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49130333A Expired JPS5931063B2 (ja) | 1974-11-12 | 1974-11-12 | フオトマスク用ブランク板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931063B2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0070102A2 (en) * | 1981-06-29 | 1983-01-19 | Minnesota Mining And Manufacturing Company | An imageable article comprising a photoresist layer coated on a metal layer having a microstructured surface |
| JPS5878149A (ja) * | 1981-11-04 | 1983-05-11 | Konishiroku Photo Ind Co Ltd | 金属画像形成材料 |
-
1974
- 1974-11-12 JP JP49130333A patent/JPS5931063B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0070102A2 (en) * | 1981-06-29 | 1983-01-19 | Minnesota Mining And Manufacturing Company | An imageable article comprising a photoresist layer coated on a metal layer having a microstructured surface |
| JPS5814130A (ja) * | 1981-06-29 | 1983-01-26 | ミネソタ・マイニング・アンド・マニフアクチユアリング・コンパニ− | 像形成物品 |
| JPH0225499B2 (xx) * | 1981-06-29 | 1990-06-04 | Minnesota Mining & Mfg | |
| JPS5878149A (ja) * | 1981-11-04 | 1983-05-11 | Konishiroku Photo Ind Co Ltd | 金属画像形成材料 |
| JPH0336217B2 (xx) * | 1981-11-04 | 1991-05-30 | Konishiroku Photo Ind |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5931063B2 (ja) | 1984-07-31 |