JPS5154143U - - Google Patents
Info
- Publication number
- JPS5154143U JPS5154143U JP12615174U JP12615174U JPS5154143U JP S5154143 U JPS5154143 U JP S5154143U JP 12615174 U JP12615174 U JP 12615174U JP 12615174 U JP12615174 U JP 12615174U JP S5154143 U JPS5154143 U JP S5154143U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974126151U JPS5520743Y2 (en:Method) | 1974-10-21 | 1974-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974126151U JPS5520743Y2 (en:Method) | 1974-10-21 | 1974-10-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5154143U true JPS5154143U (en:Method) | 1976-04-24 |
| JPS5520743Y2 JPS5520743Y2 (en:Method) | 1980-05-19 |
Family
ID=28377884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974126151U Expired JPS5520743Y2 (en:Method) | 1974-10-21 | 1974-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5520743Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280357A (ja) * | 1986-05-28 | 1987-12-05 | Yoichi Murayama | 電子ビ−ム蒸発イオンプレ−テイングとその装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (en:Method) * | 1972-07-29 | 1974-03-28 |
-
1974
- 1974-10-21 JP JP1974126151U patent/JPS5520743Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (en:Method) * | 1972-07-29 | 1974-03-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280357A (ja) * | 1986-05-28 | 1987-12-05 | Yoichi Murayama | 電子ビ−ム蒸発イオンプレ−テイングとその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5520743Y2 (en:Method) | 1980-05-19 |