JPS5147592B2 - - Google Patents

Info

Publication number
JPS5147592B2
JPS5147592B2 JP47127853A JP12785372A JPS5147592B2 JP S5147592 B2 JPS5147592 B2 JP S5147592B2 JP 47127853 A JP47127853 A JP 47127853A JP 12785372 A JP12785372 A JP 12785372A JP S5147592 B2 JPS5147592 B2 JP S5147592B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47127853A
Other languages
Japanese (ja)
Other versions
JPS4984587A (US06265458-20010724-C00056.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47127853A priority Critical patent/JPS5147592B2/ja
Publication of JPS4984587A publication Critical patent/JPS4984587A/ja
Publication of JPS5147592B2 publication Critical patent/JPS5147592B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP47127853A 1972-12-19 1972-12-19 Expired JPS5147592B2 (US06265458-20010724-C00056.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47127853A JPS5147592B2 (US06265458-20010724-C00056.png) 1972-12-19 1972-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47127853A JPS5147592B2 (US06265458-20010724-C00056.png) 1972-12-19 1972-12-19

Publications (2)

Publication Number Publication Date
JPS4984587A JPS4984587A (US06265458-20010724-C00056.png) 1974-08-14
JPS5147592B2 true JPS5147592B2 (US06265458-20010724-C00056.png) 1976-12-15

Family

ID=14970273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47127853A Expired JPS5147592B2 (US06265458-20010724-C00056.png) 1972-12-19 1972-12-19

Country Status (1)

Country Link
JP (1) JPS5147592B2 (US06265458-20010724-C00056.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733855Y2 (US06265458-20010724-C00056.png) * 1979-11-12 1982-07-26

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122887A (US06265458-20010724-C00056.png) * 1974-03-13 1975-09-26
JPS50141980A (US06265458-20010724-C00056.png) * 1974-05-02 1975-11-15
JPS6011471B2 (ja) * 1974-12-10 1985-03-26 日本電気株式会社 半導体装置
JPS51118380A (en) * 1975-04-10 1976-10-18 Mitsubishi Electric Corp Manufacturing process for ic
US4617071A (en) * 1981-10-27 1986-10-14 Fairchild Semiconductor Corporation Method of fabricating electrically connected regions of opposite conductivity type in a semiconductor structure
JPS5972165A (ja) * 1983-09-05 1984-04-24 Hitachi Ltd 半導体装置
JPS61204962A (ja) * 1985-03-08 1986-09-11 Seiko Instr & Electronics Ltd Cmosの製造方法
JPS61190974A (ja) * 1985-11-22 1986-08-25 Nec Corp 相補型mis電界効果半導体装置
JPH02156831A (ja) * 1988-12-12 1990-06-15 Freunt Ind Co Ltd 粉衣および単離方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733855Y2 (US06265458-20010724-C00056.png) * 1979-11-12 1982-07-26

Also Published As

Publication number Publication date
JPS4984587A (US06265458-20010724-C00056.png) 1974-08-14

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