JPS5147026B1 - - Google Patents

Info

Publication number
JPS5147026B1
JPS5147026B1 JP45015124A JP1512470A JPS5147026B1 JP S5147026 B1 JPS5147026 B1 JP S5147026B1 JP 45015124 A JP45015124 A JP 45015124A JP 1512470 A JP1512470 A JP 1512470A JP S5147026 B1 JPS5147026 B1 JP S5147026B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45015124A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP45015124A priority Critical patent/JPS5147026B1/ja
Priority to NL7002828A priority patent/NL7002828A/xx
Priority to DE19702009284 priority patent/DE2009284C3/de
Priority to GB957070A priority patent/GB1305792A/en
Priority to US05/384,022 priority patent/US3984186A/en
Publication of JPS5147026B1 publication Critical patent/JPS5147026B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Holders For Sensitive Materials And Originals (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP45015124A 1969-02-27 1970-02-20 Pending JPS5147026B1 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP45015124A JPS5147026B1 (enrdf_load_stackoverflow) 1970-02-20 1970-02-20
NL7002828A NL7002828A (enrdf_load_stackoverflow) 1969-02-27 1970-02-27
DE19702009284 DE2009284C3 (de) 1969-02-27 1970-02-27 Fotomasken-Projektionseinrichtung
GB957070A GB1305792A (enrdf_load_stackoverflow) 1969-02-27 1970-02-27
US05/384,022 US3984186A (en) 1969-02-27 1973-07-30 Projection masking system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45015124A JPS5147026B1 (enrdf_load_stackoverflow) 1970-02-20 1970-02-20

Publications (1)

Publication Number Publication Date
JPS5147026B1 true JPS5147026B1 (enrdf_load_stackoverflow) 1976-12-13

Family

ID=11880057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45015124A Pending JPS5147026B1 (enrdf_load_stackoverflow) 1969-02-27 1970-02-20

Country Status (1)

Country Link
JP (1) JPS5147026B1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557429U (enrdf_load_stackoverflow) * 1978-06-27 1980-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557429U (enrdf_load_stackoverflow) * 1978-06-27 1980-01-18

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