JPS5145981Y2 - - Google Patents
Info
- Publication number
- JPS5145981Y2 JPS5145981Y2 JP6366272U JP6366272U JPS5145981Y2 JP S5145981 Y2 JPS5145981 Y2 JP S5145981Y2 JP 6366272 U JP6366272 U JP 6366272U JP 6366272 U JP6366272 U JP 6366272U JP S5145981 Y2 JPS5145981 Y2 JP S5145981Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6366272U JPS5145981Y2 (ja) | 1972-05-30 | 1972-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6366272U JPS5145981Y2 (ja) | 1972-05-30 | 1972-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922845U JPS4922845U (ja) | 1974-02-26 |
| JPS5145981Y2 true JPS5145981Y2 (ja) | 1976-11-06 |
Family
ID=27954984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6366272U Expired JPS5145981Y2 (ja) | 1972-05-30 | 1972-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5145981Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6491890B2 (ja) * | 2015-01-21 | 2019-03-27 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1972
- 1972-05-30 JP JP6366272U patent/JPS5145981Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4922845U (ja) | 1974-02-26 |