JPS5145221B2 - - Google Patents
Info
- Publication number
- JPS5145221B2 JPS5145221B2 JP48012654A JP1265473A JPS5145221B2 JP S5145221 B2 JPS5145221 B2 JP S5145221B2 JP 48012654 A JP48012654 A JP 48012654A JP 1265473 A JP1265473 A JP 1265473A JP S5145221 B2 JPS5145221 B2 JP S5145221B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48012654A JPS5145221B2 (de) | 1973-01-31 | 1973-01-31 | |
| US435725A US3863069A (en) | 1973-01-31 | 1974-01-23 | Electron microscope with energy analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48012654A JPS5145221B2 (de) | 1973-01-31 | 1973-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49100951A JPS49100951A (de) | 1974-09-24 |
| JPS5145221B2 true JPS5145221B2 (de) | 1976-12-02 |
Family
ID=11811338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48012654A Expired JPS5145221B2 (de) | 1973-01-31 | 1973-01-31 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3863069A (de) |
| JP (1) | JPS5145221B2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4160905A (en) * | 1976-11-27 | 1979-07-10 | Kratos Limited | Electron microscopes |
| DE69213157T2 (de) * | 1991-10-24 | 1997-03-06 | Philips Electronics Nv | Elektronenstrahlvorrichtung |
| JP4299195B2 (ja) * | 2004-06-28 | 2009-07-22 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及びその光軸調整方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB961112A (en) * | 1962-03-27 | 1964-06-17 | Hitachi Ltd | Energy-selecting electron microscopes |
| DE1639280C3 (de) * | 1967-03-30 | 1974-01-31 | Takeo Kawasaki Kanagawa Ichinokawa (Japan) | Elektronenmikroskop mit einer magnetischen Zylinderlinse zur Energieanalyse der Elektronen |
-
1973
- 1973-01-31 JP JP48012654A patent/JPS5145221B2/ja not_active Expired
-
1974
- 1974-01-23 US US435725A patent/US3863069A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3863069A (en) | 1975-01-28 |
| JPS49100951A (de) | 1974-09-24 |