JPS5143069A - Denshisensochinoshiborikuriininguho oyobi sochi - Google Patents

Denshisensochinoshiborikuriininguho oyobi sochi

Info

Publication number
JPS5143069A
JPS5143069A JP11611074A JP11611074A JPS5143069A JP S5143069 A JPS5143069 A JP S5143069A JP 11611074 A JP11611074 A JP 11611074A JP 11611074 A JP11611074 A JP 11611074A JP S5143069 A JPS5143069 A JP S5143069A
Authority
JP
Japan
Prior art keywords
denshisensochinoshiborikuriininguho
oyobi sochi
sochi
oyobi
denshisensochinoshiborikuriininguho oyobi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11611074A
Other languages
English (en)
Inventor
Mitsuhiko Yamada
Tadao Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11611074A priority Critical patent/JPS5143069A/ja
Publication of JPS5143069A publication Critical patent/JPS5143069A/ja
Pending legal-status Critical Current

Links

JP11611074A 1974-10-11 1974-10-11 Denshisensochinoshiborikuriininguho oyobi sochi Pending JPS5143069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11611074A JPS5143069A (ja) 1974-10-11 1974-10-11 Denshisensochinoshiborikuriininguho oyobi sochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11611074A JPS5143069A (ja) 1974-10-11 1974-10-11 Denshisensochinoshiborikuriininguho oyobi sochi

Publications (1)

Publication Number Publication Date
JPS5143069A true JPS5143069A (ja) 1976-04-13

Family

ID=14678928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11611074A Pending JPS5143069A (ja) 1974-10-11 1974-10-11 Denshisensochinoshiborikuriininguho oyobi sochi

Country Status (1)

Country Link
JP (1) JPS5143069A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160383A (ja) * 1974-06-18 1975-12-25
JPS6120321A (ja) * 1984-07-06 1986-01-29 Fujitsu Ltd 電子ビ−ム露光方法
JPS6159826A (ja) * 1984-08-31 1986-03-27 Fujitsu Ltd 電子ビ−ム露光装置
JPS62160647A (ja) * 1986-01-10 1987-07-16 Hitachi Ltd 粒子線装置の絞りの清浄化法および装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160383A (ja) * 1974-06-18 1975-12-25
JPS6120321A (ja) * 1984-07-06 1986-01-29 Fujitsu Ltd 電子ビ−ム露光方法
JPS6159826A (ja) * 1984-08-31 1986-03-27 Fujitsu Ltd 電子ビ−ム露光装置
JPS62160647A (ja) * 1986-01-10 1987-07-16 Hitachi Ltd 粒子線装置の絞りの清浄化法および装置

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