JPS5142474A - Kagobutsuhandotaino shorihoho - Google Patents

Kagobutsuhandotaino shorihoho

Info

Publication number
JPS5142474A
JPS5142474A JP11554774A JP11554774A JPS5142474A JP S5142474 A JPS5142474 A JP S5142474A JP 11554774 A JP11554774 A JP 11554774A JP 11554774 A JP11554774 A JP 11554774A JP S5142474 A JPS5142474 A JP S5142474A
Authority
JP
Japan
Prior art keywords
kagobutsuhandotaino
shorihoho
kagobutsuhandotaino shorihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11554774A
Other languages
Japanese (ja)
Inventor
Fumio Murai
Hiroshi Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11554774A priority Critical patent/JPS5142474A/en
Publication of JPS5142474A publication Critical patent/JPS5142474A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
JP11554774A 1974-10-09 1974-10-09 Kagobutsuhandotaino shorihoho Pending JPS5142474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11554774A JPS5142474A (en) 1974-10-09 1974-10-09 Kagobutsuhandotaino shorihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11554774A JPS5142474A (en) 1974-10-09 1974-10-09 Kagobutsuhandotaino shorihoho

Publications (1)

Publication Number Publication Date
JPS5142474A true JPS5142474A (en) 1976-04-10

Family

ID=14665225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11554774A Pending JPS5142474A (en) 1974-10-09 1974-10-09 Kagobutsuhandotaino shorihoho

Country Status (1)

Country Link
JP (1) JPS5142474A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103438A (en) * 1980-01-22 1981-08-18 Fujitsu Ltd Evaluation of semiconductor crystal
JPS60233824A (en) * 1984-05-02 1985-11-20 Sony Corp Treating method for semiconductor substrate
JPH04212433A (en) * 1990-06-25 1992-08-04 Toshiba Corp Semiconductor substrate, manufacture of semiconductor substrate and semiconductor device, and inspection/ estimation method for semiconductor substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103438A (en) * 1980-01-22 1981-08-18 Fujitsu Ltd Evaluation of semiconductor crystal
JPS626654B2 (en) * 1980-01-22 1987-02-12 Fujitsu Ltd
JPS60233824A (en) * 1984-05-02 1985-11-20 Sony Corp Treating method for semiconductor substrate
JPH04212433A (en) * 1990-06-25 1992-08-04 Toshiba Corp Semiconductor substrate, manufacture of semiconductor substrate and semiconductor device, and inspection/ estimation method for semiconductor substrate

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