JPS5142461A - - Google Patents

Info

Publication number
JPS5142461A
JPS5142461A JP49115487A JP11548774A JPS5142461A JP S5142461 A JPS5142461 A JP S5142461A JP 49115487 A JP49115487 A JP 49115487A JP 11548774 A JP11548774 A JP 11548774A JP S5142461 A JPS5142461 A JP S5142461A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49115487A
Other languages
Japanese (ja)
Inventor
Ryoji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP49115487A priority Critical patent/JPS5142461A/ja
Publication of JPS5142461A publication Critical patent/JPS5142461A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP49115487A 1974-10-09 1974-10-09 Pending JPS5142461A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49115487A JPS5142461A (zh) 1974-10-09 1974-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49115487A JPS5142461A (zh) 1974-10-09 1974-10-09

Publications (1)

Publication Number Publication Date
JPS5142461A true JPS5142461A (zh) 1976-04-10

Family

ID=14663727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49115487A Pending JPS5142461A (zh) 1974-10-09 1974-10-09

Country Status (1)

Country Link
JP (1) JPS5142461A (zh)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005529341A (ja) * 2002-06-05 2005-09-29 クアントミックス・リミテッド サンプルを含む流体のｓｅｍ検査のための方法
JP2006147430A (ja) * 2004-11-22 2006-06-08 Hokkaido Univ 電子顕微鏡
EP2148359A2 (en) 2008-07-23 2010-01-27 Jeol Ltd. Specimen holder, specimen inspection apparatus, and specimen inspection method
US8030622B2 (en) 2008-06-20 2011-10-04 Jeol Ltd. Specimen holder, specimen inspection apparatus, and specimen inspection method
WO2013042425A1 (ja) * 2011-09-21 2013-03-28 株式会社 日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法
CN103477415A (zh) * 2011-04-11 2013-12-25 株式会社日立高新技术 带电粒子束装置
WO2014038287A1 (ja) * 2012-09-05 2014-03-13 株式会社日立ハイテクノロジーズ 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材
JP2015111595A (ja) * 2015-02-17 2015-06-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005529341A (ja) * 2002-06-05 2005-09-29 クアントミックス・リミテッド サンプルを含む流体のｓｅｍ検査のための方法
JP2006147430A (ja) * 2004-11-22 2006-06-08 Hokkaido Univ 電子顕微鏡
US8030622B2 (en) 2008-06-20 2011-10-04 Jeol Ltd. Specimen holder, specimen inspection apparatus, and specimen inspection method
EP2148359A2 (en) 2008-07-23 2010-01-27 Jeol Ltd. Specimen holder, specimen inspection apparatus, and specimen inspection method
CN103477415A (zh) * 2011-04-11 2013-12-25 株式会社日立高新技术 带电粒子束装置
CN103477415B (zh) * 2011-04-11 2016-10-12 株式会社日立高新技术 带电粒子束装置及利用带电粒子束装置进行观察的方法
JP2013069443A (ja) * 2011-09-21 2013-04-18 Hitachi High-Technologies Corp 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
WO2013042425A1 (ja) * 2011-09-21 2013-03-28 株式会社 日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法
CN103782364A (zh) * 2011-09-21 2014-05-07 株式会社日立高新技术 带电粒子线装置、带电粒子线装置的调整方法及试样的检查或试样的观察方法
US20140151553A1 (en) * 2011-09-21 2014-06-05 Hitachi High-Technologies Corporation Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
US9165741B2 (en) 2011-09-21 2015-10-20 Hitachi High-Technologies Corporation Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
KR20150133299A (ko) * 2011-09-21 2015-11-27 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치, 하전 입자선 장치의 조정 방법, 및 시료의 검사 또는 시료의 관찰 방법
US9673020B2 (en) 2011-09-21 2017-06-06 Hitachi High-Technologies Corporation Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
WO2014038287A1 (ja) * 2012-09-05 2014-03-13 株式会社日立ハイテクノロジーズ 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材
JP2015111595A (ja) * 2015-02-17 2015-06-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

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