JPS5142461A - - Google Patents
Info
- Publication number
- JPS5142461A JPS5142461A JP49115487A JP11548774A JPS5142461A JP S5142461 A JPS5142461 A JP S5142461A JP 49115487 A JP49115487 A JP 49115487A JP 11548774 A JP11548774 A JP 11548774A JP S5142461 A JPS5142461 A JP S5142461A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49115487A JPS5142461A (ko) | 1974-10-09 | 1974-10-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49115487A JPS5142461A (ko) | 1974-10-09 | 1974-10-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5142461A true JPS5142461A (ko) | 1976-04-10 |
Family
ID=14663727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49115487A Pending JPS5142461A (ko) | 1974-10-09 | 1974-10-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5142461A (ko) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005529341A (ja) * | 2002-06-05 | 2005-09-29 | クアントミックス・リミテッド | サンプルを含む流体のsem検査のための方法 |
JP2006147430A (ja) * | 2004-11-22 | 2006-06-08 | Hokkaido Univ | 電子顕微鏡 |
EP2148359A2 (en) | 2008-07-23 | 2010-01-27 | Jeol Ltd. | Specimen holder, specimen inspection apparatus, and specimen inspection method |
US8030622B2 (en) | 2008-06-20 | 2011-10-04 | Jeol Ltd. | Specimen holder, specimen inspection apparatus, and specimen inspection method |
WO2013042425A1 (ja) * | 2011-09-21 | 2013-03-28 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法 |
CN103477415A (zh) * | 2011-04-11 | 2013-12-25 | 株式会社日立高新技术 | 带电粒子束装置 |
WO2014038287A1 (ja) * | 2012-09-05 | 2014-03-13 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材 |
JP2015111595A (ja) * | 2015-02-17 | 2015-06-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
-
1974
- 1974-10-09 JP JP49115487A patent/JPS5142461A/ja active Pending
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005529341A (ja) * | 2002-06-05 | 2005-09-29 | クアントミックス・リミテッド | サンプルを含む流体のsem検査のための方法 |
JP2006147430A (ja) * | 2004-11-22 | 2006-06-08 | Hokkaido Univ | 電子顕微鏡 |
US8030622B2 (en) | 2008-06-20 | 2011-10-04 | Jeol Ltd. | Specimen holder, specimen inspection apparatus, and specimen inspection method |
EP2148359A2 (en) | 2008-07-23 | 2010-01-27 | Jeol Ltd. | Specimen holder, specimen inspection apparatus, and specimen inspection method |
CN103477415A (zh) * | 2011-04-11 | 2013-12-25 | 株式会社日立高新技术 | 带电粒子束装置 |
CN103477415B (zh) * | 2011-04-11 | 2016-10-12 | 株式会社日立高新技术 | 带电粒子束装置及利用带电粒子束装置进行观察的方法 |
JP2013069443A (ja) * | 2011-09-21 | 2013-04-18 | Hitachi High-Technologies Corp | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |
WO2013042425A1 (ja) * | 2011-09-21 | 2013-03-28 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法 |
CN103782364A (zh) * | 2011-09-21 | 2014-05-07 | 株式会社日立高新技术 | 带电粒子线装置、带电粒子线装置的调整方法及试样的检查或试样的观察方法 |
US20140151553A1 (en) * | 2011-09-21 | 2014-06-05 | Hitachi High-Technologies Corporation | Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
US9165741B2 (en) | 2011-09-21 | 2015-10-20 | Hitachi High-Technologies Corporation | Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
KR20150133299A (ko) * | 2011-09-21 | 2015-11-27 | 가부시키가이샤 히다치 하이테크놀로지즈 | 하전 입자선 장치, 하전 입자선 장치의 조정 방법, 및 시료의 검사 또는 시료의 관찰 방법 |
US9673020B2 (en) | 2011-09-21 | 2017-06-06 | Hitachi High-Technologies Corporation | Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
WO2014038287A1 (ja) * | 2012-09-05 | 2014-03-13 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置用部材、荷電粒子線装置および隔膜部材 |
JP2015111595A (ja) * | 2015-02-17 | 2015-06-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 |