JPS5141031B2 - - Google Patents

Info

Publication number
JPS5141031B2
JPS5141031B2 JP12472972A JP12472972A JPS5141031B2 JP S5141031 B2 JPS5141031 B2 JP S5141031B2 JP 12472972 A JP12472972 A JP 12472972A JP 12472972 A JP12472972 A JP 12472972A JP S5141031 B2 JPS5141031 B2 JP S5141031B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12472972A
Other languages
Japanese (ja)
Other versions
JPS4981284A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12472972A priority Critical patent/JPS5141031B2/ja
Publication of JPS4981284A publication Critical patent/JPS4981284A/ja
Publication of JPS5141031B2 publication Critical patent/JPS5141031B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12472972A 1972-12-14 1972-12-14 Expired JPS5141031B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12472972A JPS5141031B2 (cg-RX-API-DMAC7.html) 1972-12-14 1972-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12472972A JPS5141031B2 (cg-RX-API-DMAC7.html) 1972-12-14 1972-12-14

Publications (2)

Publication Number Publication Date
JPS4981284A JPS4981284A (cg-RX-API-DMAC7.html) 1974-08-06
JPS5141031B2 true JPS5141031B2 (cg-RX-API-DMAC7.html) 1976-11-08

Family

ID=14892649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12472972A Expired JPS5141031B2 (cg-RX-API-DMAC7.html) 1972-12-14 1972-12-14

Country Status (1)

Country Link
JP (1) JPS5141031B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024180949A1 (ja) * 2023-02-28 2024-09-06 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211372A (ja) * 1986-03-11 1987-09-17 Matsushita Electric Ind Co Ltd スパツタリング装置
JPS62211371A (ja) * 1986-03-11 1987-09-17 Matsushita Electric Ind Co Ltd スパツタリング装置
JPH07116597B2 (ja) * 1989-07-20 1995-12-13 石油公団 スパッタリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024180949A1 (ja) * 2023-02-28 2024-09-06 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置
JP2024121928A (ja) * 2023-02-28 2024-09-09 株式会社アドバンスト・スパッタテック スパッタリング成膜源および成膜装置

Also Published As

Publication number Publication date
JPS4981284A (cg-RX-API-DMAC7.html) 1974-08-06

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