JPS5139978B2 - - Google Patents
Info
- Publication number
- JPS5139978B2 JPS5139978B2 JP48132933A JP13293373A JPS5139978B2 JP S5139978 B2 JPS5139978 B2 JP S5139978B2 JP 48132933 A JP48132933 A JP 48132933A JP 13293373 A JP13293373 A JP 13293373A JP S5139978 B2 JPS5139978 B2 JP S5139978B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48132933A JPS5139978B2 (ko) | 1973-11-26 | 1973-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48132933A JPS5139978B2 (ko) | 1973-11-26 | 1973-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5083435A JPS5083435A (ko) | 1975-07-05 |
| JPS5139978B2 true JPS5139978B2 (ko) | 1976-10-30 |
Family
ID=15092880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48132933A Expired JPS5139978B2 (ko) | 1973-11-26 | 1973-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5139978B2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6323406Y2 (ko) * | 1984-10-02 | 1988-06-27 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337744A (en) * | 1976-09-20 | 1978-04-07 | Nippon Steel Corp | Control of atmosphere in which coated film is cured by radiation of electronrays and equipment therefor |
| JPS6082133A (ja) * | 1983-10-14 | 1985-05-10 | Citizen Watch Co Ltd | 紫外線照射装置 |
| JPH0625587U (ja) * | 1992-06-22 | 1994-04-08 | エイシン株式会社 | 支持ばねおよび回転圧縮機の隔壁板支持用の支持ばね |
| DE10083500T1 (de) * | 1999-10-12 | 2002-01-31 | Toyo Ink Mfg Co | Verfahren und Vorrichtung zur Bestrahlung mit einem aktiven Energiestrahl |
| JP4682456B2 (ja) * | 2001-06-18 | 2011-05-11 | 株式会社日立ハイテクノロジーズ | 基板処理方法及び基板処理装置 |
-
1973
- 1973-11-26 JP JP48132933A patent/JPS5139978B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6323406Y2 (ko) * | 1984-10-02 | 1988-06-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5083435A (ko) | 1975-07-05 |