JPS5139978B2 - - Google Patents

Info

Publication number
JPS5139978B2
JPS5139978B2 JP48132933A JP13293373A JPS5139978B2 JP S5139978 B2 JPS5139978 B2 JP S5139978B2 JP 48132933 A JP48132933 A JP 48132933A JP 13293373 A JP13293373 A JP 13293373A JP S5139978 B2 JPS5139978 B2 JP S5139978B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48132933A
Other languages
Japanese (ja)
Other versions
JPS5083435A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48132933A priority Critical patent/JPS5139978B2/ja
Publication of JPS5083435A publication Critical patent/JPS5083435A/ja
Publication of JPS5139978B2 publication Critical patent/JPS5139978B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP48132933A 1973-11-26 1973-11-26 Expired JPS5139978B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48132933A JPS5139978B2 (enrdf_load_stackoverflow) 1973-11-26 1973-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48132933A JPS5139978B2 (enrdf_load_stackoverflow) 1973-11-26 1973-11-26

Publications (2)

Publication Number Publication Date
JPS5083435A JPS5083435A (enrdf_load_stackoverflow) 1975-07-05
JPS5139978B2 true JPS5139978B2 (enrdf_load_stackoverflow) 1976-10-30

Family

ID=15092880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48132933A Expired JPS5139978B2 (enrdf_load_stackoverflow) 1973-11-26 1973-11-26

Country Status (1)

Country Link
JP (1) JPS5139978B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337744A (en) * 1976-09-20 1978-04-07 Nippon Steel Corp Control of atmosphere in which coated film is cured by radiation of electronrays and equipment therefor
JPS6082133A (ja) * 1983-10-14 1985-05-10 Citizen Watch Co Ltd 紫外線照射装置
JPH0625587U (ja) * 1992-06-22 1994-04-08 エイシン株式会社 支持ばねおよび回転圧縮機の隔壁板支持用の支持ばね
DE10083500T1 (de) 1999-10-12 2002-01-31 Toyo Ink Mfg Co Verfahren und Vorrichtung zur Bestrahlung mit einem aktiven Energiestrahl
JP4682456B2 (ja) * 2001-06-18 2011-05-11 株式会社日立ハイテクノロジーズ 基板処理方法及び基板処理装置
JP7721886B2 (ja) * 2020-11-11 2025-08-13 ウシオ電機株式会社 紫外線処理装置および紫外線処理方法

Also Published As

Publication number Publication date
JPS5083435A (enrdf_load_stackoverflow) 1975-07-05

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