JPS5138984A - - Google Patents

Info

Publication number
JPS5138984A
JPS5138984A JP11154174A JP11154174A JPS5138984A JP S5138984 A JPS5138984 A JP S5138984A JP 11154174 A JP11154174 A JP 11154174A JP 11154174 A JP11154174 A JP 11154174A JP S5138984 A JPS5138984 A JP S5138984A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11154174A
Other languages
Japanese (ja)
Other versions
JPS5518048B2 (enExample
Inventor
Yutaka Misawa
Tatsuya Kamei
Hideyuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11154174A priority Critical patent/JPS5518048B2/ja
Publication of JPS5138984A publication Critical patent/JPS5138984A/ja
Publication of JPS5518048B2 publication Critical patent/JPS5518048B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
  • Dicing (AREA)
JP11154174A 1974-09-30 1974-09-30 Expired JPS5518048B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11154174A JPS5518048B2 (enExample) 1974-09-30 1974-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11154174A JPS5518048B2 (enExample) 1974-09-30 1974-09-30

Publications (2)

Publication Number Publication Date
JPS5138984A true JPS5138984A (enExample) 1976-03-31
JPS5518048B2 JPS5518048B2 (enExample) 1980-05-16

Family

ID=14563969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11154174A Expired JPS5518048B2 (enExample) 1974-09-30 1974-09-30

Country Status (1)

Country Link
JP (1) JPS5518048B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478979A (en) * 1977-12-06 1979-06-23 Mitsubishi Electric Corp Semiconductor device and its manufacture
JPS5478978A (en) * 1977-12-06 1979-06-23 Mitsubishi Electric Corp Semiconductor device
JPS5656642A (en) * 1979-10-15 1981-05-18 Mitsubishi Electric Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121787A (en) * 1974-08-16 1976-02-21 Hitachi Ltd Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121787A (en) * 1974-08-16 1976-02-21 Hitachi Ltd Handotaisochino seizohoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478979A (en) * 1977-12-06 1979-06-23 Mitsubishi Electric Corp Semiconductor device and its manufacture
JPS5478978A (en) * 1977-12-06 1979-06-23 Mitsubishi Electric Corp Semiconductor device
JPS5656642A (en) * 1979-10-15 1981-05-18 Mitsubishi Electric Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5518048B2 (enExample) 1980-05-16

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