JPS5138878A - - Google Patents
Info
- Publication number
- JPS5138878A JPS5138878A JP11215474A JP11215474A JPS5138878A JP S5138878 A JPS5138878 A JP S5138878A JP 11215474 A JP11215474 A JP 11215474A JP 11215474 A JP11215474 A JP 11215474A JP S5138878 A JPS5138878 A JP S5138878A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49112154A JPS5936740B2 (ja) | 1974-09-27 | 1974-09-27 | マスク作製法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49112154A JPS5936740B2 (ja) | 1974-09-27 | 1974-09-27 | マスク作製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5138878A true JPS5138878A (ja) | 1976-03-31 |
JPS5936740B2 JPS5936740B2 (ja) | 1984-09-05 |
Family
ID=14579575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49112154A Expired JPS5936740B2 (ja) | 1974-09-27 | 1974-09-27 | マスク作製法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5936740B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62198861A (ja) * | 1986-02-27 | 1987-09-02 | Hoya Corp | レテイクル |
-
1974
- 1974-09-27 JP JP49112154A patent/JPS5936740B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62198861A (ja) * | 1986-02-27 | 1987-09-02 | Hoya Corp | レテイクル |
Also Published As
Publication number | Publication date |
---|---|
JPS5936740B2 (ja) | 1984-09-05 |