JPS5138584B2 - - Google Patents

Info

Publication number
JPS5138584B2
JPS5138584B2 JP581672A JP581672A JPS5138584B2 JP S5138584 B2 JPS5138584 B2 JP S5138584B2 JP 581672 A JP581672 A JP 581672A JP 581672 A JP581672 A JP 581672A JP S5138584 B2 JPS5138584 B2 JP S5138584B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP581672A
Other languages
Japanese (ja)
Other versions
JPS4876471A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP581672A priority Critical patent/JPS5138584B2/ja
Publication of JPS4876471A publication Critical patent/JPS4876471A/ja
Publication of JPS5138584B2 publication Critical patent/JPS5138584B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP581672A 1972-01-14 1972-01-14 Expired JPS5138584B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP581672A JPS5138584B2 (xx) 1972-01-14 1972-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP581672A JPS5138584B2 (xx) 1972-01-14 1972-01-14

Publications (2)

Publication Number Publication Date
JPS4876471A JPS4876471A (xx) 1973-10-15
JPS5138584B2 true JPS5138584B2 (xx) 1976-10-22

Family

ID=11621595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP581672A Expired JPS5138584B2 (xx) 1972-01-14 1972-01-14

Country Status (1)

Country Link
JP (1) JPS5138584B2 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053134Y2 (xx) * 1987-01-14 1993-01-26

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118662A (xx) * 1974-03-01 1975-09-17
JPS50134365A (xx) * 1974-04-09 1975-10-24
JPS5810821A (ja) * 1981-07-14 1983-01-21 Fujitsu Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053134Y2 (xx) * 1987-01-14 1993-01-26

Also Published As

Publication number Publication date
JPS4876471A (xx) 1973-10-15

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