JPS5138584B2 - - Google Patents

Info

Publication number
JPS5138584B2
JPS5138584B2 JP581672A JP581672A JPS5138584B2 JP S5138584 B2 JPS5138584 B2 JP S5138584B2 JP 581672 A JP581672 A JP 581672A JP 581672 A JP581672 A JP 581672A JP S5138584 B2 JPS5138584 B2 JP S5138584B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP581672A
Other languages
Japanese (ja)
Other versions
JPS4876471A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP581672A priority Critical patent/JPS5138584B2/ja
Publication of JPS4876471A publication Critical patent/JPS4876471A/ja
Publication of JPS5138584B2 publication Critical patent/JPS5138584B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP581672A 1972-01-14 1972-01-14 Expired JPS5138584B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP581672A JPS5138584B2 (https=) 1972-01-14 1972-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP581672A JPS5138584B2 (https=) 1972-01-14 1972-01-14

Publications (2)

Publication Number Publication Date
JPS4876471A JPS4876471A (https=) 1973-10-15
JPS5138584B2 true JPS5138584B2 (https=) 1976-10-22

Family

ID=11621595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP581672A Expired JPS5138584B2 (https=) 1972-01-14 1972-01-14

Country Status (1)

Country Link
JP (1) JPS5138584B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118662A (https=) * 1974-03-01 1975-09-17
JPS50134365A (https=) * 1974-04-09 1975-10-24
JPS5810821A (ja) * 1981-07-14 1983-01-21 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS4876471A (https=) 1973-10-15

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