JPS513737Y2 - - Google Patents
Info
- Publication number
- JPS513737Y2 JPS513737Y2 JP6286171U JP6286171U JPS513737Y2 JP S513737 Y2 JPS513737 Y2 JP S513737Y2 JP 6286171 U JP6286171 U JP 6286171U JP 6286171 U JP6286171 U JP 6286171U JP S513737 Y2 JPS513737 Y2 JP S513737Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Non-Electrical Variables (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6286171U JPS513737Y2 (ja) | 1971-07-19 | 1971-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6286171U JPS513737Y2 (ja) | 1971-07-19 | 1971-07-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4819655U JPS4819655U (ja) | 1973-03-06 |
| JPS513737Y2 true JPS513737Y2 (ja) | 1976-02-03 |
Family
ID=27953460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6286171U Expired JPS513737Y2 (ja) | 1971-07-19 | 1971-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS513737Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2514348Y2 (ja) * | 1990-02-16 | 1996-10-16 | ローム株式会社 | 半導体における不純物拡散用恒温槽 |
-
1971
- 1971-07-19 JP JP6286171U patent/JPS513737Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4819655U (ja) | 1973-03-06 |