JPS513715B2 - - Google Patents

Info

Publication number
JPS513715B2
JPS513715B2 JP7818673A JP7818673A JPS513715B2 JP S513715 B2 JPS513715 B2 JP S513715B2 JP 7818673 A JP7818673 A JP 7818673A JP 7818673 A JP7818673 A JP 7818673A JP S513715 B2 JPS513715 B2 JP S513715B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7818673A
Other languages
Japanese (ja)
Other versions
JPS5026791A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7818673A priority Critical patent/JPS513715B2/ja
Publication of JPS5026791A publication Critical patent/JPS5026791A/ja
Publication of JPS513715B2 publication Critical patent/JPS513715B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP7818673A 1973-07-11 1973-07-11 Expired JPS513715B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7818673A JPS513715B2 (cs) 1973-07-11 1973-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7818673A JPS513715B2 (cs) 1973-07-11 1973-07-11

Publications (2)

Publication Number Publication Date
JPS5026791A JPS5026791A (cs) 1975-03-19
JPS513715B2 true JPS513715B2 (cs) 1976-02-05

Family

ID=13654933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7818673A Expired JPS513715B2 (cs) 1973-07-11 1973-07-11

Country Status (1)

Country Link
JP (1) JPS513715B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5177410U (cs) * 1974-12-16 1976-06-18

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155746U (cs) * 1976-05-21 1977-11-26
JPS5367152A (en) * 1976-11-29 1978-06-15 Ebara Corp Heat-pipe heat exchanger and production thereof
JPS5629590Y2 (cs) * 1978-10-03 1981-07-14
JPS6060904A (ja) * 1983-09-09 1985-04-08 Senichi Masuda オゾン発生装置
JPH0822727B2 (ja) * 1987-12-18 1996-03-06 東京エレクトロン九州株式会社 オゾン発生装置及びオゾン発生方法
JP2641886B2 (ja) * 1988-02-15 1997-08-20 東京エレクトロン株式会社 オゾン発生装置
JPH01264908A (ja) * 1988-04-13 1989-10-23 Teru Kyushu Kk オゾン発生装置
JPH0255205A (ja) * 1988-08-18 1990-02-23 Teru Kyushu Kk オゾン発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5177410U (cs) * 1974-12-16 1976-06-18

Also Published As

Publication number Publication date
JPS5026791A (cs) 1975-03-19

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