JPS5136548B1 - - Google Patents

Info

Publication number
JPS5136548B1
JPS5136548B1 JP439271A JP439271A JPS5136548B1 JP S5136548 B1 JPS5136548 B1 JP S5136548B1 JP 439271 A JP439271 A JP 439271A JP 439271 A JP439271 A JP 439271A JP S5136548 B1 JPS5136548 B1 JP S5136548B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP439271A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP439271A priority Critical patent/JPS5136548B1/ja
Publication of JPS5136548B1 publication Critical patent/JPS5136548B1/ja
Pending legal-status Critical Current

Links

JP439271A 1971-02-01 1971-02-01 Pending JPS5136548B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP439271A JPS5136548B1 (en) 1971-02-01 1971-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP439271A JPS5136548B1 (en) 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
JPS5136548B1 true JPS5136548B1 (en) 1976-10-08

Family

ID=11583069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP439271A Pending JPS5136548B1 (en) 1971-02-01 1971-02-01

Country Status (1)

Country Link
JP (1) JPS5136548B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816065A (en) * 1981-07-22 1983-01-29 Matsushita Electric Ind Co Ltd Vacuum plating device
JPS59145564U (en) * 1983-03-18 1984-09-28 株式会社日立製作所 sputtering equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4828508A (en) * 1971-08-06 1973-04-16
JPS4842770U (en) * 1971-09-23 1973-06-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4828508A (en) * 1971-08-06 1973-04-16
JPS4842770U (en) * 1971-09-23 1973-06-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816065A (en) * 1981-07-22 1983-01-29 Matsushita Electric Ind Co Ltd Vacuum plating device
JPS59145564U (en) * 1983-03-18 1984-09-28 株式会社日立製作所 sputtering equipment

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