JPS5135346B2 - - Google Patents
Info
- Publication number
- JPS5135346B2 JPS5135346B2 JP47047682A JP4768272A JPS5135346B2 JP S5135346 B2 JPS5135346 B2 JP S5135346B2 JP 47047682 A JP47047682 A JP 47047682A JP 4768272 A JP4768272 A JP 4768272A JP S5135346 B2 JPS5135346 B2 JP S5135346B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47047682A JPS5135346B2 (de) | 1972-05-16 | 1972-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47047682A JPS5135346B2 (de) | 1972-05-16 | 1972-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4914082A JPS4914082A (de) | 1974-02-07 |
| JPS5135346B2 true JPS5135346B2 (de) | 1976-10-01 |
Family
ID=12782035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47047682A Expired JPS5135346B2 (de) | 1972-05-16 | 1972-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135346B2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52156299A (en) * | 1976-06-21 | 1977-12-26 | Japan Atom Energy Res Inst | High temperature ion irradiating device |
| JP2507302B2 (ja) * | 1984-09-19 | 1996-06-12 | アプライド マテリアルズ インコーポレーテッド | 半導体ウエハをイオンインプランテ−シヨンする装置及び方法 |
| JP4581239B2 (ja) * | 2000-12-12 | 2010-11-17 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
-
1972
- 1972-05-16 JP JP47047682A patent/JPS5135346B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4914082A (de) | 1974-02-07 |