JPS5134273B2 - - Google Patents
Info
- Publication number
- JPS5134273B2 JPS5134273B2 JP12785572A JP12785572A JPS5134273B2 JP S5134273 B2 JPS5134273 B2 JP S5134273B2 JP 12785572 A JP12785572 A JP 12785572A JP 12785572 A JP12785572 A JP 12785572A JP S5134273 B2 JPS5134273 B2 JP S5134273B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12785572A JPS5134273B2 (de) | 1972-12-19 | 1972-12-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12785572A JPS5134273B2 (de) | 1972-12-19 | 1972-12-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4984588A JPS4984588A (de) | 1974-08-14 |
JPS5134273B2 true JPS5134273B2 (de) | 1976-09-25 |
Family
ID=14970323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12785572A Expired JPS5134273B2 (de) | 1972-12-19 | 1972-12-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5134273B2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735547B2 (de) * | 1976-11-10 | 1982-07-29 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5240082A (en) * | 1975-09-25 | 1977-03-28 | Nec Corp | Resistor element and process for production of same |
JPS54114186A (en) * | 1978-02-27 | 1979-09-06 | Fujitsu Ltd | Semiconductor integrated circuit device and its manufacture |
-
1972
- 1972-12-19 JP JP12785572A patent/JPS5134273B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735547B2 (de) * | 1976-11-10 | 1982-07-29 |
Also Published As
Publication number | Publication date |
---|---|
JPS4984588A (de) | 1974-08-14 |