JPS5133561A - Kohiteikokagobutsuhandotai no kisoseichoho - Google Patents

Kohiteikokagobutsuhandotai no kisoseichoho

Info

Publication number
JPS5133561A
JPS5133561A JP49105523A JP10552374A JPS5133561A JP S5133561 A JPS5133561 A JP S5133561A JP 49105523 A JP49105523 A JP 49105523A JP 10552374 A JP10552374 A JP 10552374A JP S5133561 A JPS5133561 A JP S5133561A
Authority
JP
Japan
Prior art keywords
kohiteikokagobutsuhandotai
kisoseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49105523A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5829615B2 (ja
Inventor
Takeya Nakai
Masayuki Chifuku
Akihiro Shibatomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP49105523A priority Critical patent/JPS5829615B2/ja
Publication of JPS5133561A publication Critical patent/JPS5133561A/ja
Publication of JPS5829615B2 publication Critical patent/JPS5829615B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP49105523A 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ Expired JPS5829615B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49105523A JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49105523A JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Publications (2)

Publication Number Publication Date
JPS5133561A true JPS5133561A (en) 1976-03-22
JPS5829615B2 JPS5829615B2 (ja) 1983-06-23

Family

ID=14409943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49105523A Expired JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Country Status (1)

Country Link
JP (1) JPS5829615B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219590A (ja) * 1986-03-19 1987-09-26 Nec Corp 光半導体集積素子及びその製造方法
JPH02275796A (ja) * 1989-01-13 1990-11-09 Nec Corp 気相成長方法及び埋め込み構造半導体レーザの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544923B2 (ja) * 2004-07-06 2010-09-15 古河機械金属株式会社 気相成長装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1966 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219590A (ja) * 1986-03-19 1987-09-26 Nec Corp 光半導体集積素子及びその製造方法
JPH02275796A (ja) * 1989-01-13 1990-11-09 Nec Corp 気相成長方法及び埋め込み構造半導体レーザの製造方法

Also Published As

Publication number Publication date
JPS5829615B2 (ja) 1983-06-23

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