JPS5132532B2 - - Google Patents

Info

Publication number
JPS5132532B2
JPS5132532B2 JP6346372A JP6346372A JPS5132532B2 JP S5132532 B2 JPS5132532 B2 JP S5132532B2 JP 6346372 A JP6346372 A JP 6346372A JP 6346372 A JP6346372 A JP 6346372A JP S5132532 B2 JPS5132532 B2 JP S5132532B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6346372A
Other languages
Japanese (ja)
Other versions
JPS4924066A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6346372A priority Critical patent/JPS5132532B2/ja
Publication of JPS4924066A publication Critical patent/JPS4924066A/ja
Publication of JPS5132532B2 publication Critical patent/JPS5132532B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP6346372A 1972-06-23 1972-06-23 Expired JPS5132532B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6346372A JPS5132532B2 (enrdf_load_stackoverflow) 1972-06-23 1972-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6346372A JPS5132532B2 (enrdf_load_stackoverflow) 1972-06-23 1972-06-23

Publications (2)

Publication Number Publication Date
JPS4924066A JPS4924066A (enrdf_load_stackoverflow) 1974-03-04
JPS5132532B2 true JPS5132532B2 (enrdf_load_stackoverflow) 1976-09-13

Family

ID=13229944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6346372A Expired JPS5132532B2 (enrdf_load_stackoverflow) 1972-06-23 1972-06-23

Country Status (1)

Country Link
JP (1) JPS5132532B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325633B2 (enrdf_load_stackoverflow) * 1973-03-24 1978-07-27
JPS6034253B2 (ja) * 1976-05-21 1985-08-07 新技術開発事業団 液相エピタキシヤル成長方法
JPS58148426A (ja) * 1982-03-01 1983-09-03 Semiconductor Res Found 成長装置

Also Published As

Publication number Publication date
JPS4924066A (enrdf_load_stackoverflow) 1974-03-04

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