JPS5132532B2 - - Google Patents
Info
- Publication number
- JPS5132532B2 JPS5132532B2 JP6346372A JP6346372A JPS5132532B2 JP S5132532 B2 JPS5132532 B2 JP S5132532B2 JP 6346372 A JP6346372 A JP 6346372A JP 6346372 A JP6346372 A JP 6346372A JP S5132532 B2 JPS5132532 B2 JP S5132532B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6346372A JPS5132532B2 (cs) | 1972-06-23 | 1972-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6346372A JPS5132532B2 (cs) | 1972-06-23 | 1972-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4924066A JPS4924066A (cs) | 1974-03-04 |
| JPS5132532B2 true JPS5132532B2 (cs) | 1976-09-13 |
Family
ID=13229944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6346372A Expired JPS5132532B2 (cs) | 1972-06-23 | 1972-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132532B2 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325633B2 (cs) * | 1973-03-24 | 1978-07-27 | ||
| JPS6034253B2 (ja) * | 1976-05-21 | 1985-08-07 | 新技術開発事業団 | 液相エピタキシヤル成長方法 |
| JPS58148426A (ja) * | 1982-03-01 | 1983-09-03 | Semiconductor Res Found | 成長装置 |
-
1972
- 1972-06-23 JP JP6346372A patent/JPS5132532B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4924066A (cs) | 1974-03-04 |