JPS5132459B2 - - Google Patents

Info

Publication number
JPS5132459B2
JPS5132459B2 JP7335971A JP7335971A JPS5132459B2 JP S5132459 B2 JPS5132459 B2 JP S5132459B2 JP 7335971 A JP7335971 A JP 7335971A JP 7335971 A JP7335971 A JP 7335971A JP S5132459 B2 JPS5132459 B2 JP S5132459B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7335971A
Other languages
Japanese (ja)
Other versions
JPS4839177A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7335971A priority Critical patent/JPS5132459B2/ja
Publication of JPS4839177A publication Critical patent/JPS4839177A/ja
Publication of JPS5132459B2 publication Critical patent/JPS5132459B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP7335971A 1971-09-22 1971-09-22 Expired JPS5132459B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7335971A JPS5132459B2 (cs) 1971-09-22 1971-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7335971A JPS5132459B2 (cs) 1971-09-22 1971-09-22

Publications (2)

Publication Number Publication Date
JPS4839177A JPS4839177A (cs) 1973-06-08
JPS5132459B2 true JPS5132459B2 (cs) 1976-09-13

Family

ID=13515882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7335971A Expired JPS5132459B2 (cs) 1971-09-22 1971-09-22

Country Status (1)

Country Link
JP (1) JPS5132459B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52118269U (cs) * 1976-03-05 1977-09-07

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610789B2 (cs) * 1972-02-10 1981-03-10
JPS6118348B2 (cs) * 1974-04-15 1986-05-12 Nippon Electric Co
JPS51129185A (en) * 1975-05-02 1976-11-10 Fujitsu Ltd Manufacturing method of field efect transistor
JPS548475A (en) * 1977-06-22 1979-01-22 Fujitsu Ltd Manufacture for semiconductor
JPS5943095B2 (ja) * 1980-04-23 1984-10-19 株式会社東芝 集積回路の製造方法
JPH02161753A (ja) * 1988-12-14 1990-06-21 Mitsubishi Electric Corp 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52118269U (cs) * 1976-03-05 1977-09-07

Also Published As

Publication number Publication date
JPS4839177A (cs) 1973-06-08

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