JPS5131189B1 - - Google Patents

Info

Publication number
JPS5131189B1
JPS5131189B1 JP47084897A JP8489772A JPS5131189B1 JP S5131189 B1 JPS5131189 B1 JP S5131189B1 JP 47084897 A JP47084897 A JP 47084897A JP 8489772 A JP8489772 A JP 8489772A JP S5131189 B1 JPS5131189 B1 JP S5131189B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47084897A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47084897A priority Critical patent/JPS5131189B1/ja
Publication of JPS5131189B1 publication Critical patent/JPS5131189B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Holders For Sensitive Materials And Originals (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP47084897A 1972-08-24 1972-08-24 Pending JPS5131189B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47084897A JPS5131189B1 (ja) 1972-08-24 1972-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47084897A JPS5131189B1 (ja) 1972-08-24 1972-08-24

Publications (1)

Publication Number Publication Date
JPS5131189B1 true JPS5131189B1 (ja) 1976-09-04

Family

ID=13843518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47084897A Pending JPS5131189B1 (ja) 1972-08-24 1972-08-24

Country Status (1)

Country Link
JP (1) JPS5131189B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394372U (ja) * 1976-12-29 1978-08-01

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2720146A (en) * 1951-07-27 1955-10-11 Buckbee Mears Co Photo-printing apparatus
US2814975A (en) * 1954-08-16 1957-12-03 Norman B Mears Photo-printing apparatus
US3192844A (en) * 1963-03-05 1965-07-06 Kulicke And Soffa Mfg Company Mask alignment fixture
US3280715A (en) * 1964-06-11 1966-10-25 United Aircraft Corp Micropattern aligning device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2720146A (en) * 1951-07-27 1955-10-11 Buckbee Mears Co Photo-printing apparatus
US2814975A (en) * 1954-08-16 1957-12-03 Norman B Mears Photo-printing apparatus
US3192844A (en) * 1963-03-05 1965-07-06 Kulicke And Soffa Mfg Company Mask alignment fixture
US3280715A (en) * 1964-06-11 1966-10-25 United Aircraft Corp Micropattern aligning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394372U (ja) * 1976-12-29 1978-08-01

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