JPS5130698A - - Google Patents
Info
- Publication number
- JPS5130698A JPS5130698A JP49103217A JP10321774A JPS5130698A JP S5130698 A JPS5130698 A JP S5130698A JP 49103217 A JP49103217 A JP 49103217A JP 10321774 A JP10321774 A JP 10321774A JP S5130698 A JPS5130698 A JP S5130698A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
- Particle Accelerators (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49103217A JPS5130698A (OSRAM) | 1974-09-07 | 1974-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49103217A JPS5130698A (OSRAM) | 1974-09-07 | 1974-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5130698A true JPS5130698A (OSRAM) | 1976-03-16 |
Family
ID=14348322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49103217A Pending JPS5130698A (OSRAM) | 1974-09-07 | 1974-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5130698A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139764U (OSRAM) * | 1976-04-15 | 1977-10-22 | ||
| JPS5635775A (en) * | 1980-08-06 | 1981-04-08 | Fujitsu Ltd | Ion beam etching method |
-
1974
- 1974-09-07 JP JP49103217A patent/JPS5130698A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139764U (OSRAM) * | 1976-04-15 | 1977-10-22 | ||
| JPS5635775A (en) * | 1980-08-06 | 1981-04-08 | Fujitsu Ltd | Ion beam etching method |