JPS5130148U - - Google Patents

Info

Publication number
JPS5130148U
JPS5130148U JP9906074U JP9906074U JPS5130148U JP S5130148 U JPS5130148 U JP S5130148U JP 9906074 U JP9906074 U JP 9906074U JP 9906074 U JP9906074 U JP 9906074U JP S5130148 U JPS5130148 U JP S5130148U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9906074U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9906074U priority Critical patent/JPS5130148U/ja
Publication of JPS5130148U publication Critical patent/JPS5130148U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP9906074U 1974-08-21 1974-08-21 Pending JPS5130148U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9906074U JPS5130148U (ja) 1974-08-21 1974-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9906074U JPS5130148U (ja) 1974-08-21 1974-08-21

Publications (1)

Publication Number Publication Date
JPS5130148U true JPS5130148U (ja) 1976-03-04

Family

ID=28301643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9906074U Pending JPS5130148U (ja) 1974-08-21 1974-08-21

Country Status (1)

Country Link
JP (1) JPS5130148U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6379916U (ja) * 1986-11-12 1988-05-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6379916U (ja) * 1986-11-12 1988-05-26
JPH0242262Y2 (ja) * 1986-11-12 1990-11-09

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